Ohmic and Schottky contacts of hydrogenated and oxygenated boron-doped single-crystal diamond with hill-like polycrystalline grains

doi:10.1088/1674-1056/ac032b

Abstract Hill-like polycrystalline diamond grains (HPDGs) randomly emerged on a heavy boron-doped p⁺ single-crystal diamond (SCD) film by prolonging the growth duration of the chemical vapor deposition process. The Raman spectral results confirm that a relatively higher boron concentration (～ 1.1×10²¹ cm^-3) is detected on the HPDG with respect to the SCD region (～ 5.4×10²⁰ cm^-3). It demonstrates that the Au/SCD interface can be modulated from ohmic to Schottky contact by varying the surface from hydrogen to oxygen termination. The current-voltage curve between two HPDGs is nearly linear with either oxygen or hydrogen termination, which means that the HPDGs provide a leakage path to form an ohmic contact. There are obvious rectification characteristics between oxygen-terminated HPDGs and SCD based on the difference in boron doping levels in those regions. The results reveal that the highly boron-doped HPDGs grown in SCD can be adopted as ohmic electrodes for Hall measurement and electronic devices.

Keywords: CVD diamond film boron-doped diamond film ohmic contact Schottky junction

Received: 01 April 2021
Revised: 14 May 2021
Accepted manuscript online: 20 May 2021

PACS:	68.47.Fg	(Semiconductor surfaces)
	68.47.Gh	(Oxide surfaces)
	71.55.Eq	(III-V semiconductors)
	72.20.-i	(Conductivity phenomena in semiconductors and insulators)

Fund: Project supported by the Key-Area Research and Development Program of Guangdong Province (Grant No. 2020B0101690001) and the National Natural Science Foundation of China (NSFC) (Grant No. 51972135).

Corresponding Authors: Shao-Heng Cheng, Qi-Liang Wang, Hong-Dong Li
E-mail: chengshaoheng@jlu.edu.cn;wangqiliang@jlu.edu.cn;hdli@jlu.edu.cn

Cite this article:

Jing-Cheng Wang(王旌丞), Hao Chen(陈浩), Lin-Feng Wan(万琳丰), Cao-Yuan Mu(牟草源), Yao-Feng Liu(刘尧峰), Shao-Heng Cheng(成绍恒), Qi-Liang Wang(王启亮), Liu-An Li(李柳暗), and Hong-Dong Li(李红东) Ohmic and Schottky contacts of hydrogenated and oxygenated boron-doped single-crystal diamond with hill-like polycrystalline grains 2021 Chin. Phys. B 30 096803

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Ohmic and Schottky contacts of hydrogenated and oxygenated boron-doped single-crystal diamond with hill-like polycrystalline grains

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