| PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
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Effects of secondary electron emission on plasma characteristics in dual-frequency atmospheric pressure helium discharge by fluid modeling |
| Yi-Nan Wang(王一男)1, Shuai-Xing Li(李帅星)1, Yue Liu(刘悦)2, Li Wang(王莉)1 |
1 College of Science, Liaoning Shihua University, Fushun 113001, China;
2 Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), Dalian University of Technology, Dalian 116024, China |
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Abstract A one-dimensional (1D) fluid simulation of dual frequency discharge in helium gas at atmospheric pressure is carried out to investigate the role of the secondary electron emission on the surfaces of the electrodes. In the simulation, electrons, ions of He+ and He2+, metastable atoms of Heast and metastable molecules of He2* are included. It is found that the secondary electron emission coefficient significantly influences plasma density and electric field as well as electron heating mechanisms and ionization rate. The particle densities increase with increasing SEE coefficient from 0 to 0.3 as well as the sheath's electric field and electron source. Moreover, the SEE coefficient also influences the electron heating mechanism and electron power dissipation in the plasma and both of them increase with increasing SEE coefficient within the range from 0 to 0.3 as a result of increasing of electron density.
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Received: 09 October 2018
Revised: 02 December 2018
Accepted manuscript online:
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PACS:
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52.50.Dg
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(Plasma sources)
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52.50.Qt
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(Plasma heating by radio-frequency fields; ICR, ICP, helicons)
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52.65.-y
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(Plasma simulation)
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| Fund: Project supported by the National Natural Science Foundation of China (Grant No. 11505089). |
Corresponding Authors:
Yue Liu
E-mail: liuyue@dlut.edu.cn
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Cite this article:
Yi-Nan Wang(王一男), Shuai-Xing Li(李帅星), Yue Liu(刘悦), Li Wang(王莉) Effects of secondary electron emission on plasma characteristics in dual-frequency atmospheric pressure helium discharge by fluid modeling 2019 Chin. Phys. B 28 025202
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