INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY |
Prev
Next
|
|
|
Nanoscale spatial phase modulation of GaAs growth in V-grooved trenches on Si (001) substrate |
Shi-Yan Li(李士颜), Xu-Liang Zhou(周旭亮), Xiang-Ting Kong(孔祥挺), Meng-Ke Li(李梦珂), Jun-Ping Mi(米俊萍), Meng-Qi Wang(王梦琦), Jiao-Qing Pan(潘教青) |
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
|
|
Abstract This letter reports the nanoscale spatial phase modulation of GaAs growth in V-grooved trenches fabricated on a Si (001) substrate by metal-organic vapor-phase epitaxy. Two hexagonal GaAs regions with high density of stacking faults parallel to Si {111} surfaces are observed. A strain-relieved and defect-free cubic phase GaAs was achieved above these highly defective regions. High-resolution transmission electron microscopy and fast Fourier transforms analysis were performed to characterize these regions of GaAs/Si interface. We also discussed the strain relaxation mechanism and phase structure modulation of GaAs selectively grown on this artificially manipulated surface.
|
Received: 20 December 2015
Revised: 25 August 2016
Accepted manuscript online:
|
PACS:
|
81.05.Ea
|
(III-V semiconductors)
|
|
81.05.Cy
|
(Elemental semiconductors)
|
|
64.75.Qr
|
(Phase separation and segregation in semiconductors)
|
|
Fund: Project supported by the National Science and Technology Major Project of Science and Technology of China (Grant No. 2011ZX02708) and the National Natural Science Foundation of China (Grant No. 61504137). |
Corresponding Authors:
Jiao-Qing Pan
E-mail: jqpan@semi.ac.cn
|
Cite this article:
Shi-Yan Li(李士颜), Xu-Liang Zhou(周旭亮), Xiang-Ting Kong(孔祥挺), Meng-Ke Li(李梦珂), Jun-Ping Mi(米俊萍), Meng-Qi Wang(王梦琦), Jiao-Qing Pan(潘教青) Nanoscale spatial phase modulation of GaAs growth in V-grooved trenches on Si (001) substrate 2016 Chin. Phys. B 25 128101
|
[1] |
Zhou X, Tang C W, Li Q and Lau K M 2012 Phys. Status Solidi A 209 1380
|
[2] |
Li J Z, Bai J, Park J S, Adekore B, Fox K, Carroll M and Shellenbarger Z 2007 Appl. Phys. Let. 91 021114
|
[3] |
Ghosh R N, Griffing B and Ballantyne J M 1986 Appl. Phys. Lett. 48 370
|
[4] |
Chen H, Zhang Z, Huang B, Mao L and Zhang Z 2015 J. Semicond. 36 121001
|
[5] |
Xi X W, Chai C C, Liu Y, Yang Y T, Fan Q Y and Shi C L 2016 Chin. Phys. B 25 088504
|
[6] |
Wu L S, Zhao Y, Shen H C, Zhang Y T and Chen T S 2016 Chin. Phys. B 25 067306
|
[7] |
Zhou X, Pan J, Liang R, Wang J and Wang W 2014 J. Semicond. 35 073002
|
[8] |
Krost A, Schnabel R F, Heinrichsdorff F, Rossow U, Bimberg D and Cerva H 1994 J. Cryst. Growth 145 314
|
[9] |
Krost A, Heinrichsdorff F and Bimberg D 1994 Appl. Phys. Lett. 64 769
|
[10] |
Paladugu M, Merckling C, Loo R and Richard O 2012 Cryst. Growth Des. 12 4696
|
[11] |
Wang G, Leys M, Loo R and Richard O 2014 Appl. Phys. Lett. 105 062101
|
[12] |
Li Shi Y, Zhou X L, Kong X T, Li M K, Mi J P, Bian J, Wang W and Pan J Q 2015 Chin. Phys. Lett. 32 028101
|
[13] |
Lee S C, Sun X Y, Hersee S D and Brueck S R J 2004 Appl. Phys. Lett. 8 2079
|
[14] |
Lee S C, Pattada B and Hersee S D 2005 J. Quantum Electron. 41 596
|
[15] |
Zhao D, Zhao D, Jiang D, Liu Z and Zhu J 2015 J. Semicond. 36 063003
|
[16] |
Li S, Zhou X, Kong X, Li M and Mi J 2015 Appl. Phys. Lett. 108 021902
|
[17] |
Bordel D, Guimard D, Rajesh M, Nishioka M and Arakawa Y 2010 Appl. Phys. Lett. 96 043101
|
[18] |
Xu Q, Hsu J W P, Carlin J A, Sieg R M, Boeckl J J and Ringel S A 1999 Appl. Phys. Lett. 75 2111
|
[19] |
Yeh C Y, Lu Z W, Froyen S and Zunger A 1992 Phys. Rev. B 46 10086
|
[20] |
Krost A, Heinrichsdorff F, Bimberg D and Cerva H 1994 Appl. Phys. Lett. 64 769
|
[21] |
Dynna M and Marty A 1998 Acta Mater. 46 1087
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|