Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film

doi:10.1088/1674-1056/25/10/104205

Abstract In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 ℃ on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.

Keywords: gold-chromium film film stress diffusion

Received: 10 March 2016
Revised: 03 May 2016
Accepted manuscript online:

PACS:	42.79.Wc	(Optical coatings)
	68.35.Gy	(Mechanical properties; surface strains)
	68.35.Fx	(Diffusion; interface formation)
	42.70.Hj	(Laser materials)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61405225).

Corresponding Authors: Yun-Xia Jin
E-mail: yxjin@siom.ac.cn

Cite this article:

Hong Zhang(张洪), Yun-Xia Jin(晋云霞), Hu Wang(王虎), Fang-Yu Kong(孔钒宇), Hao-Peng Huang(黄昊鹏), Yun Cui(崔云) Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film 2016 Chin. Phys. B 25 104205

[1]	Nakano N and Ogawa. S 1994 Sensor Actiat B-Chem. 21 51
[2]	Baia. M, Baia L and Astilean S 2005 Chem. Phys. Lett. 404 3
[3]	Zhong Y T, Cheng Z Q, Ma L, Wang J H, Hao Z H and Wang Q Q 2014 Chin. Phys. Lett. 31 047302
[4]	Xenogiannopoulou E, Iliopoulos K, Couris S, Karakouz T, Vaskevich A and Rubinstein I 2008 Adv. Funct Mater. 18 1281
[5]	Hohenau A, Krenn J R, Garcia-Vidal F J, Rodrigo S G, Martin-Moreno L, Beermann J and Bozhevolnyi S I 2007 Phys. Rev. B 75 085104
[6]	Ding B, Pemble M E, Korovin A V, Peschel U and Romanov S G 2010 Phys. Rev. B 82 035119
[7]	Guan H Y, Chen H, Wu J B, Jin Y X, Kong F Y, Liu S J, Yi K and Shao J D 2014 Opt. Lett. 39 170
[8]	Guan H Y, Jin Y X, Liu S J, Kong F Y, Du Y, He K, Yi K and Shao J D 2014 Appl. Phys. B 114 557
[9]	Bonod. N and Neauport. J 2006 Opt. Commun. 260 649
[10]	Palmier S, Neauport J, Baclet N, Lavastre E and Dupuy G 2009 Opt. Express 17 20430
[11]	Liu S J, Ma J Y, Shen Z C, Kong W J, Shen J, Jin Y X, Zhao Y A, Shao J D and Fan Z X 2007 Acta Phys. Sin. 56 4542 (in Chinese)
[12]	Xu X D, Liu Y, Qiu K Q, Liu Z K, Hong Y L and Fu S J 2013 Acta Phys. Sin. 62 234202 (in Chinese)
[13]	Howard H P, Aiello A F, Dressler J G, Edwards N R and Kessler T J and Kozlov A A, Manwaring I R, Marshall K L, Oliver J B and Papernov S 2013 Appl. Opt. 52 1682
[14]	Chen, S B, Sheng B, Xu X D and Fu S J 2010 Proc. SPIE 7655 22
[15]	Ashe B, Giacofei C, Myhre G and Schmid A W 2007 Proc. SPIE 6720 67200N
[16]	Liddell H P, Mehrotra K, Lambropoulos J C and Jacobs S D 2013 Appl. Opt. 52 7689
[17]	Wu J B, Jin Y X, Guan H Y, Kong F Y, Liu W W, Liu S J and Yi K 2014 J. Inorg. Mater. 29 1087
[18]	Munitz A and Komem Y 1976 Thin Solid Films 37 171
[19]	George M, Glaunsinger W, Thundat T and Lindsay S 1990 Thin Solid Films 189 59
[20]	Moody N, Adams D, Medlin D, Headley T, Yang N and Volinsky A 2003 Int. J. Fracture 120 407
[21]	Nix W and Clemens B 1999 J. Mater. Res. 14 3467
[22]	Chason E, Sheldon B, Freund L, Floro J and Hearne S 2002 Phys. Rev. Lett. 88 156103
[23]	Friesen C and Thompson C 2004 Phys. Rev. Lett. 93 056104
[24]	Koch R, Hu D and Das A 2005 Phys. Rev. Lett. 94 146101
[25]	Miller D C, Herrmann C F, Maier H J, George S M, Stoldt C R and Gall K 2005 Scr. Mater. 52 873
[26]	Liu B and Terano M 2001 J. Mol. Catal A-Chem. 172 227
[27]	Surviliene S, Jasulaitiene V, Cesuniece A and Lisowska-Oleksiak 2008 Solid State Ionics 179 222
[28]	Vancea J, Reiss G, Schneider F, Bauer K and Hoffmann H 1989 Surf. Sci. 218 108
[29]	Gaspar A B, Perez C and Dieguez L 2005 Appl. Surf. Sci. 252 939
[30]	Desimoni E, Malitesta C, Zambonin P and Riviere J 1988 Surf. Interface Anal. 13 173
[31]	Kim J and Hummel R 1990 Phys. Status Solidi A 122 255
[32]	Gardner D S and Flinn P A 1990 J. Appl. Phys. 67 1831
[33]	Harris K E and King A H 1994 A tem investigation of the effects of tensile stress on thin film microstructure and surface morphology (London: Cambridge University Press) p. 75
[34]	Mullins W 1958 Acta Metall. Sin. 6 414

[1]	Heterogeneous hydration patterns of G-quadruplex DNA Cong-Min Ji(祭聪敏), Yusong Tu(涂育松), and Yuan-Yan Wu(吴园燕). Chin. Phys. B, 2023, 32(2): 028702.
[2]	Coercivity enhancement of sintered Nd-Fe-B magnets by grain boundary diffusion with Pr_80-xAl_xCu₂₀ alloys Zhe-Huan Jin(金哲欢), Lei Jin(金磊), Guang-Fei Ding(丁广飞), Shuai Guo(郭帅), Bo Zheng(郑波),Si-Ning Fan(樊思宁), Zhi-Xiang Wang(王志翔), Xiao-Dong Fan(范晓东), Jin-Hao Zhu(朱金豪),Ren-Jie Chen(陈仁杰), A-Ru Yan(闫阿儒), Jing Pan(潘晶), and Xin-Cai Liu(刘新才). Chin. Phys. B, 2023, 32(1): 017505.
[3]	Anomalous diffusion in branched elliptical structure Kheder Suleiman, Xuelan Zhang(张雪岚), Erhui Wang(王二辉),Shengna Liu(刘圣娜), and Liancun Zheng(郑连存). Chin. Phys. B, 2023, 32(1): 010202.
[4]	Phosphorus diffusion and activation in fluorine co-implanted germanium after excimer laser annealing Chen Wang(王尘), Wei-Hang Fan(范伟航), Yi-Hong Xu(许怡红), Yu-Chao Zhang(张宇超), Hui-Chen Fan(范慧晨), Cheng Li(李成), and Song-Yan Cheng(陈松岩). Chin. Phys. B, 2022, 31(9): 098503.
[5]	Improving sound diffusion in a reverberation tank using a randomly fluctuating surface Qi Li(李琪), Dingding Xie(谢丁丁), Rui Tang(唐锐), Dajing Shang(尚大晶), and Zhichao Lv(吕志超). Chin. Phys. B, 2022, 31(6): 064302.
[6]	Self-adaptive behavior of nunchakus-like tracer induced by active Brownian particles Yi-Qi Xia(夏益祺), Guo-Qiang Feng(冯国强), and Zhuang-Lin Shen(谌庄琳). Chin. Phys. B, 2022, 31(4): 040204.
[7]	Diffusion of a chemically active colloidal particle in composite channels Xin Lou(娄辛), Rui Liu(刘锐), Ke Chen(陈科), Xin Zhou(周昕), Rudolf Podgornik, and Mingcheng Yang(杨明成). Chin. Phys. B, 2022, 31(4): 044704.
[8]	Solid-liquid transition induced by the anisotropic diffusion of colloidal particles Fu-Jun Lin(蔺福军), Jing-Jing Liao(廖晶晶), Jian-Chun Wu(吴建春), and Bao-Quan Ai(艾保全). Chin. Phys. B, 2022, 31(3): 036401.
[9]	Time evolution law of a two-mode squeezed light field passing through twin diffusion channels Hai-Jun Yu(余海军) and Hong-Yi Fan(范洪义). Chin. Phys. B, 2022, 31(2): 020301.
[10]	AA-stacked borophene-graphene bilayer as an anode material for alkali-metal ion batteries with a superhigh capacity Yi-Bo Liang(梁艺博), Zhao Liu(刘钊), Jing Wang(王静), and Ying Liu(刘英). Chin. Phys. B, 2022, 31(11): 116302.
[11]	Diffusion dynamics in branched spherical structure Kheder Suleiman, Xue-Lan Zhang(张雪岚), Sheng-Na Liu(刘圣娜), and Lian-Cun Zheng(郑连存). Chin. Phys. B, 2022, 31(11): 110202.
[12]	Microwave absorption properties regulation and bandwidth formula of oriented Y₂Fe₁₇N_3-δ@SiO₂/PU composite synthesized by reduction-diffusion method Hao Wang(王浩), Liang Qiao(乔亮), Zu-Ying Zheng(郑祖应), Hong-Bo Hao(郝宏波), Tao Wang(王涛), Zheng Yang(杨正), and Fa-Shen Li(李发伸). Chin. Phys. B, 2022, 31(11): 114206.
[13]	Thermal apoptosis analysis considering injection behavior optimization and mass diffusion during magnetic hyperthermia Yun-Dong Tang(汤云东), Jian Zou(邹建), Rodolfo C C Flesch(鲁道夫 C C 弗莱施), Tao Jin(金涛), and Ming-Hua He(何明华). Chin. Phys. B, 2022, 31(1): 014401.
[14]	A new simplified ordered upwind method for calculating quasi-potential Qing Yu(虞晴) and Xianbin Liu(刘先斌). Chin. Phys. B, 2022, 31(1): 010502.
[15]	Analysis on diffusion-induced stress for multi-layer spherical core-shell electrodes in Li-ion batteries Siyuan Yang(杨思源), Chuanwei Li(李传崴), Zhifeng Qi(齐志凤), Lipan Xin(辛立攀), Linan Li(李林安), Shibin Wang(王世斌), and Zhiyong Wang(王志勇). Chin. Phys. B, 2021, 30(9): 098201.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film

Cite this article:

Online attention