Optimization of TiO2/Cu/TiO2 multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature

doi:10.1088/1674-1056/24/4/047701

Abstract Highly transparent indium-free composite electrodes of TiO₂/Cu/TiO₂ are deposited by electron-beam evaporation at room temperature. The effects of Cu thickness and annealing temperature on the electrical and optical properties of the multilayer film are investigated. The critical thickness of Cu mid-layer to form a continuous conducting layer is found to be 11 nm. The multilayer with a mid-Cu thickness of 11 nm is optimized to obtain a resistivity of 7.4× 10^-5 Ω · cm and an average optical transmittance of 86% in the visible spectral range. The figure of merit of the TiO₂/Cu(11 nm)/TiO₂ multilayer annealed at 150 ℃ reaches a minimum resistivity of 5.9× 10^-5Ω · cm and an average optical transmittance of 88% in the visible spectral range. The experimental results indicate that TiO₂/Cu/TiO₂ multilayers can be used as a transparent electrode for solar cell and other display applications.

Keywords: multilayer transparent conductor thin film annealing

Received: 27 July 2014
Revised: 28 October 2014
Accepted manuscript online:

PACS:	77.55.-g	(Dielectric thin films)
	68.55.-a	(Thin film structure and morphology)
	81.15.Hi	(Molecular, atomic, ion, and chemical beam epitaxy)

Fund: Project supported by the Research Innovation Key Project of Education Committee of Shanghai, China (Grant No. 14ZZ137) and the National Cultivation Fund from University of Shanghai for Science and Technology (Grant No. 14XPM04).

Corresponding Authors: Wang Xiao-Ping
E-mail: wxpchina64@aliyun.com,wxpchina@sohu.com

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Sun Hong-Tao (孙洪涛), Wang Xiao-Ping (王小平), Kou Zhi-Qi (寇志起), Wang Li-Jun (王丽军), Wang Jin-Ye (王金烨), Sun Yi-Qing (孙义清) Optimization of TiO₂/Cu/TiO₂ multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature 2015 Chin. Phys. B 24 047701

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Optimization of TiO2/Cu/TiO2 multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature

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Optimization of TiO₂/Cu/TiO₂ multilayers as a transparent composite electrode deposited by electron-beam evaporation at room temperature