| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space |
| Shang-Qi Kuang(匡尚奇)1,2,†, Bo-Chao Li(李博超)1,2, Yi Wang(王依)3, Xue-Peng Gong(龚学鹏)3,‡, and Jing-Quan Lin(林景全)1,2,§ |
1 School of Science, Changchun University of Science and Technology, Changchun 130022, China;
2 Key Laboratory of Ultrafast and Extreme Ultraviolet Optics, Changchun University of Science and Technology, Changchun 130022, China;
3 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China |
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Abstract With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multi-objective genetic algorithms is theoretically proposed. Owing to the multi-objective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction. Compared with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.
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Received: 06 September 2021
Revised: 06 September 2021
Accepted manuscript online: 12 January 2022
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PACS:
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78.67.Pt
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(Multilayers; superlattices; photonic structures; metamaterials)
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41.50.+h
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(X-ray beams and x-ray optics)
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42.79.Ci
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(Filters, zone plates, and polarizers)
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| Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 62175018, 61905239, and 61974142) and Jilin Scientific and Technological Development Plan, China (Grant Nos. 20190201013JC and 20200401052GX). |
Corresponding Authors:
Shang-Qi Kuang, Xue-Peng Gong, Jing-Quan Lin
E-mail: ksq@cust.edu.cn;gongxuepeng120@foxmail.com;linjingquan@cust.edu.cn
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Cite this article:
Shang-Qi Kuang(匡尚奇), Bo-Chao Li(李博超), Yi Wang(王依), Xue-Peng Gong(龚学鹏), and Jing-Quan Lin(林景全) Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space 2022 Chin. Phys. B 31 077802
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[1] Bakshi V 2018 EUV Lithography, 2nd edn
[2] Wang Z S, Wang H C, Zhu J T, Wang F L, Gu Z X, Chen L Y, Michette A G, Powell A K, Pfauntsch S J and Schäfers F 2006 J. Appl. Phys. 99 056108
[3] Wang Z S, Wang H C, Zhu J T, Zhang Z, Wang F L, Xu Y, Zhang S M, Wu W J, Chen L Y, Michette A G, Pfauntsch S J, Powell A K, Schäfers F, Gaupp A, Cui M Q, Sun L J and MacDonald M 2007 Appl. Phys. Lett. 90 081910
[4] Harada T and Watanabe T 2018 Proc. SPIE 10809 108091
[5] Pirozhkov A S and Ragozin E N 2015 Phys.-Usp. 58 1095
[6] Huang Q S, Medvedev V, van de Kruijs R, Yakshin A, Louis E and Bijkerk F 2017 Appl. Phys. Rev. 4 011104
[7] Aquila A L, Salmassi F, Dollar F, Liu Y and Gullikson E 2006 Opt. Express 14 10073
[8] Lin C Y, Chen S J, Chen Z Y and Ding Y C 2015 Chin. Phys. B 24 117802
[9] Wang H C, Zhu J T, Wang Z S, Zhang Z, Zhang S M, Wu W J, Chen L Y, Michette A G, Powell A K, Pfauntsch S J, Schfers F and Gaupp A 2006 Thin Solid Films 515 2523
[10] Tan M Y, Zhu J T, Chen L Y, Wang Z S, Le Guen K, Jonnard P, Giglia A, Mahne N and Nannarone S 2011 Nucl. Instrum. Meth. A 654 588
[11] Yakshin A E, Kozhevnikov I V, Zoethout E, Louis E and Bijkerk F 2010 Opt. Express 18 6957
[12] Kozhevnikov I V, Yakshin A E and Bijkerk F 2015 Opt. Express 23 9276
[13] Jiang H and Michette A G 2013 Nucl. Instrum. Meth. A 703 22
[14] Diveki Z, Bourassin-Bouchet C, de Rossi S, English E, Meltchakov E, Gobert O, Guénot D, Carré B, Saliéres P, Ruchon T and Delmotte F 2014 J. Mod. Opt. 61 122
[15] Yang X W, Kozhevnikov I V, Huang Q S, Wang H C, Sawhney K and Wang Z S 2016 Opt. Express 24 15079
[16] Mahdi E, Mohsen G and Zeinab S 2018 Chin. Phys. B 27 106802
[17] Pervak V, Trubetskov M K and Tikhonravov A V 2011 Opt. Express 19 2371
[18] Wang W L 2013 Optik 124 2482
[19] Kuang S Q, Gong X P and Yang H G 2018 Opt. Commun. 410 805
[20] Kuang S Q, Wang J B, Yang H G, Huo T L and Zhou H J 2019 AIP Adv. 9 045027
[21] Lin Q Z, Ma Y P, Chen J Y, Zhu Q L, Coello Coello C A, Wong K C and Chen F 2018 Inform. Sciences 430-431 46
[22] Liu R C, Li J X, Feng W, Yu X and Jiao L C 2018 Soft Comput. 22 6311
[23] Henke B L, Gullikson and Davis J C 1993 At. Data Tables 54 181
[24] Windt D L 1998 Comput. Phys. 12 360
[25] Wu S Y, Long X W and Yang K Y 2012 ISRN Optics 2012 659642
[26] Deb K, Pratap A, Agarwal S and Meyarivan T 2002 IEEE T. Evolut. Comput. 6 182
[27] Zitzler E, Laumanns M and Thiele L 2001 SPEA2:Improving the Strength Pareto Evolutionary Algorithm (Eidgenössische Technische Hochschule Zürich) (Institut für Technische Informatik und Kommunikationsnetze)
[28] Kuang S Q, Gong X P and Yang H G 2017 J. Appl. Phys. 122 185302
[29] Furman S and Tikhonravov A 1992 Basics of Optics of Multilayer Systems (Edition Frontieres) pp. 58-68 |
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