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Chin. Phys. B, 2014, Vol. 23(12): 127104    DOI: 10.1088/1674-1056/23/12/127104
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Effects of GaN cap layer thickness on an AlN/GaN heterostructure

Zhao Jing-Tao (赵景涛)a, Lin Zhao-Jun (林兆军)a, Luan Chong-Biao (栾崇彪)a, Lü Yuan-Jie (吕元杰)b, Feng Zhi-Hong (冯志宏)b, Yang Ming (杨铭)a
a School of Physics, Shandong University, Jinan 250100, China;
b National Key Laboratory of Application Specific Integrated Circuit (ASIC), Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
Abstract  In this study, we investigate the effects of GaN cap layer thickness on the two-dimensional electron gas (2DEG) electron density and 2DEG electron mobility of AlN/GaN heterostructures by using the temperature-dependent Hall measurement and theoretical fitting method. The results of our analysis clearly indicate that the GaN cap layer thickness of an AlN/GaN heterostructure has influences on the 2DEG electron density and the electron mobility. For the AlN/GaN heterostructures with a 3-nm AlN barrier layer, the optimized thickness of the GaN cap layer is around 4 nm and the strained a-axis lattice constant of the AlN barrier layer is less than that of GaN.
Keywords:  AlN/GaN heterostructure      2DEG      GaN cap layer      a-axis lattice constant  
Received:  03 June 2014      Revised:  05 August 2014      Accepted manuscript online: 
PACS:  71.55.Eq (III-V semiconductors)  
  77.22.Ej (Polarization and depolarization)  
  77.80.bn (Strain and interface effects)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11174182 and 61306113) and the Specialized Research Fund for the Doctoral Program of Higher Education, China (Grant No. 20110131110005).
Corresponding Authors:  Lin Zhao-Jun     E-mail:  linzj@sdu.edu.cn

Cite this article: 

Zhao Jing-Tao (赵景涛), Lin Zhao-Jun (林兆军), Luan Chong-Biao (栾崇彪), Lü Yuan-Jie (吕元杰), Feng Zhi-Hong (冯志宏), Yang Ming (杨铭) Effects of GaN cap layer thickness on an AlN/GaN heterostructure 2014 Chin. Phys. B 23 127104

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