CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES |
Prev
Next
|
|
|
Tunable Ba0.5Sr0.5TiO3 film bulk acoustic resonators using SiO2/Mo Bragg reflectors |
Yang Tian-Ying (杨天应), Jiang Shu-Wen (蒋书文), Li Ru-Guan (李汝冠), Jiang Bin (姜斌) |
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China |
|
|
Abstract Tunable and switchable Ba0.5Sr0.5TiO3 film bulk acoustic resonators (FBARs) based on SiO2/Mo Bragg reflectors are explored, which can withstand high temperature for the deposition of BaxSr1-xTiO3 (BST) films at 800 ℃. The dc bias-dependent resonance may be attributed to the piezoelectricity of the BST film induced by an electrostrictive effect. The series resonant frequency is strongly dc bias-dependent and shifts downwards with dc bias increasing, while the parallel resonant frequency is only weakly dc bias-dependent and slightly shifts upwards at low dc bias (< 45 V) while downwards at higher dc bias. The calculated relative tunability of shifts at series resonance frequency is around -2.3% and the electromechanical coupling coefficient is up to approximately 8.09% at 60-V dc bias, which can be comparable to AlN FBARs. This suggests that a high-quality tunable BST FBAR device can be achieved through the use of molybdenum (Mo) as the high acoustic impedance layer in a Bragg reflector, which not only provides excellent acoustic isolation from the substrate, but also improves the crystallinity of BST films withstanding higher deposition temperature.
|
Received: 04 March 2012
Revised: 28 April 2012
Accepted manuscript online:
|
PACS:
|
68.60.Bs
|
(Mechanical and acoustical properties)
|
|
72.50.+b
|
(Acoustoelectric effects)
|
|
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 60871049 and 50972024). |
Corresponding Authors:
Yang Tian-Ying, Jiang Shu-Wen
E-mail: yangtianying521@163.com; jiangsw@uestc.edu.cn
|
Cite this article:
Yang Tian-Ying (杨天应), Jiang Shu-Wen (蒋书文), Li Ru-Guan (李汝冠), Jiang Bin (姜斌) Tunable Ba0.5Sr0.5TiO3 film bulk acoustic resonators using SiO2/Mo Bragg reflectors 2012 Chin. Phys. B 21 106801
|
[1] |
Qin J R, Chen S M, Liang B and Liu B W 2012 Chin. Phys. B 21 029401
|
[2] |
Zhang C X, Nie Y H and Liang J Q 2008 Chin. Phys. B 17 2670
|
[3] |
Berge J, Norling M, Vorobiev A and Gevorgian S 2008 J. Appl. Phys. 103 064508
|
[4] |
Vendik I B, Turalchuk P A, Vendik O G and Berge J 2008 J. Appl. Phys. 103 014107
|
[5] |
Schreiter M, Gabl R, Pitzer D, Priming R and Wersing W 2004 J. Eur. Ceram. 24 1589
|
[6] |
Noeth A, Yamada T, Sherman V O, Muralt P, Tagantsev A K and Setter N 2007 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54 2487
|
[7] |
Guo Z R, Yang Z Q, Yin B X and Sun M Z 2010 Chin. Phys. B 19 116201
|
[8] |
Noeth A, Yamada T, Muralt P, Tagantsev A K and Setter N 2010 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57 378
|
[9] |
Tappe S, Böttger U and Waser R 2004 Appl. Phys. Lett. 85 624
|
[10] |
Turalchuk P, Vendik I, Vendik and Berge J 2008 Proceedings of the 38th European Microwave Conference, October 27-31, 2008, Amsterdam, Netherlande, p. 1695
|
[11] |
Zhu X E, Lee V, Phillips J and Mortazawi A 2009 IEEE Microw. Wireless Componen. Lett. 19 359
|
[12] |
Zhu X E, Phillips J D and Mortazawi A 2007 Proceedings of International Microwave Symposium, June 3-8, 2007, Hawaii, USA, p. 671
|
[13] |
Mikhailov A, Prudan A, Ptashnik S, Samoilova T and Kozyrev A 2010 Proceedings of the 40th European Microwave Conference, September 28-30, 2010, Paris, France, p. 791
|
[14] |
Zhao H J 2012 Chin. Phys. B 21 087104
|
[15] |
Xiong K, Xiao X, Hu Y T, Li Z Y, Chu T, Yu Y D and Yu J Zh 2012 Chin. Phys. B 21 074203
|
[16] |
Yang Y M, Wang J F, Xia S, Bai P, Li Z, Wang J, Xu Z and Qu S B 2011 Chin. Phys. B 20 014101
|
[17] |
Huang Q Z, Yu J Z, Chen S W, Xu X J, Han W H and Fang Z C 2008 Chin. Phys. B 17 2562
|
[18] |
Meng X Z, Wang M Z and Ren Z M 2011 Chin. Phys. B 20 050702
|
[19] |
Vorobievl A and Gevorgian S 2010 IEEE Microwave Symp. Digest, MTTS Int. 57 379
|
[20] |
Berge J, Vorobiev A, Steichen W and Gevorgian S 2007 IEEE Trans. Microw. Wireless Comput. Lett. 17 655
|
[21] |
Vorobieva A and Gevorgian S 2010 Appl. Phys. Lett. 96 212904
|
[22] |
Vorobiev A, Berge J, Norling M and Gevorgian S 2010 Proceedings of the 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, January 11-13, New Orleans, USA, p. 41
|
[23] |
Saddik G N, Boesch D S, Stemmer S and York R A 2007 Appl. Phys. Lett. 91 043501
|
[24] |
Volatier A, Defaÿ E, Aïd M, N'hari A, Ancey P and Dubus B 2008 Appl. Phys. Lett. 92 032906
|
[25] |
Sanchez S, Rhun G L, Suhm A and Defaÿ E 2010 Proceedings of the 40th European Microwave Conference, Septembe 28-30, Paris, France, p. 799
|
[26] |
Noeth A, Yamada T, Sherman V O, Muralt P, Tagantsev A K and Setter N 2007 J. Appl. Phys. 102 114110
|
[27] |
Noeth A, Yamada T, Tagantsev A K and Setter N 2008 J. Appl. Phys. 104 094102
|
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|