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Chinese Physics, 2007, Vol. 16(6): 1743-1747    DOI: 10.1088/1009-1963/16/6/044
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Tradeoff between speed and static power dissipation of ultra-thin body SOI MOSFETs

Tian Yu(田豫), Huang Ru(黄如), Zhang Xing(张兴), and Wang Yang-Yuan(王阳元)
Institute of Microelectronics, Peking University, Beijing 100871, China
Abstract  The speed performance and static power dissipation of the ultra-thin-body (UTB) MOSFETs have been comprehensively investigated, with both DC and AC behaviours considered. Source/drain extension width ($L_{\rm sp})$ and silicon film thickness $(t_{\rm si})$ are two independent parameters that influence the speed and static power dissipation of UTB silicon-on-insulator (SOI) MOSFETs respectively, which can result in great design flexibility. Based on the different effects of physical and geometric parameters on device characteristics, a method to alleviate the contradiction between power dissipated and speed of UTB SOI MOSFETs is proposed. The optimal design regions of $t_{\rm si}$ and $L_{\rm sp}$ for low operating power and high performance logic applications are given, which may shed light on the design of UTB SOI MOSFETs.
Keywords:  ultra-thin-body      SOI      MOSFET      simulation  
Received:  06 September 2006      Revised:  05 January 2007      Accepted manuscript online: 
PACS:  85.30.Tv (Field effect devices)  
  73.40.Qv (Metal-insulator-semiconductor structures (including semiconductor-to-insulator))  
  85.30.De (Semiconductor-device characterization, design, and modeling)  
Fund: Project supported by the National Natural Science Foundation of China (Grant No~60625403), the State Key Development Program for Basic Research of China (Grant No~2006CB302701).

Cite this article: 

Tian Yu(田豫), Huang Ru(黄如), Zhang Xing(张兴), and Wang Yang-Yuan(王阳元) Tradeoff between speed and static power dissipation of ultra-thin body SOI MOSFETs 2007 Chinese Physics 16 1743

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