Photon Craft Project, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences and Japan Science and Technology Agency, Shanghai 201800, China
Abstract We report on an optical interference method to fabricate arrayed holes on metal nickel foil and aluminum film deposited on glass substrate by means of five-beam interference of femtosecond laser pulses. Optical microscope and scanning electron microscope observations revealed that arrayed holes of micrometer-order are fabricated on both metal foil and metal film. The present technique allows one-step, large-area, micrometer processing of metal materials for potential industrial applications.
Received: 16 September 2004
Revised: 24 November 2004
Accepted manuscript online:
(Scanning electron microscopy (SEM) (including EBIC))
Fund: Project supported by the National Natural Science Foundation of China (Grant No: 50125208), Shanghai Science and Technology Committee (Grant No: 04dz05112), China Postdoctoral Science Foundation, and K. C. Wong Education Foundation, Hong Kong.
Cite this article:
Zhao Quan-Zhong (赵全忠), Qiu Jian-Rong (邱建荣), Zhao Chong-Jun (赵崇军), Jiang Xiong-Wei (姜雄伟), Zhu Cong-Shan (朱从善) Formation of arrayed holes on metal foil and metal film by multibeam interfering femtosecond laser beams 2005 Chinese Physics 14 1181
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