Tunable characteristic of phase-locked quantum cascade laser arrays

doi:10.1088/1674-1056/abec30

Abstract A multimode interference (MMI) structure is designed to simplify the fabrication of quantum cascade laser (QCL) phase-locked arrays. The MMI geometry is optimized with a sufficient output channel distance to accommodate conventional photolithography and wet etching process by which power amplifier array is fabricated without using the complicated two-step etching-regrowth or dry etching technique. The far-field pattern with periodically modulated peaks reveals that the beams from the arrays are phase-locked. Furthermore, the frequency tuning performance of the MMI-based phase-locked arrays is studied using the Littrow-configuration external cavity structure. A wavelength tuning range of more than 60 cm^-1 is demonstrated, which will eventually realize the high power, frequency tunable, large-scale phase-locked arrays, and their application in spectroscopy.

Keywords: multimode interference (MMI) phase-locked quantum cascade laser (QCL) external cavity

Received: 19 January 2021
Revised: 01 March 2021
Accepted manuscript online: 05 March 2021

PACS:	42.25.Bs	(Wave propagation, transmission and absorption)
	42.55.Px	(Semiconductor lasers; laser diodes)
	42.60.Fc	(Modulation, tuning, and mode locking)
	42.82.Et	(Waveguides, couplers, and arrays)

Fund: Project supported by the National Basic Research Program of China (Grant Nos. 2018YFA0209103 and 2018YFB2200504), the National Natural Science Foundation of China (Grant Nos. 61991430, 61774146, 61790583, 61674144, 61774150, and 61805168), the Beijing Municipal Science & Technology Commission, China (Grant No. Z201100004020006), and the Key Projects of the Chinese Academy of Sciences (Grant Nos. 2018147, YJKYYQ20190002, QYZDJ-SSW-JSC027, and XDB43000000).

Corresponding Authors: Jin-Chuan Zhang, Feng-Qi Liu
E-mail: zhangjinchuan@semi.ac.cn;fqliu@semi.ac.cn

Cite this article:

Zeng-Hui Gu(顾增辉), Jin-Chuan Zhang(张锦川), Huan Wang(王欢), Peng-Chang Yang(杨鹏昌), Ning Zhuo(卓宁), Shen-Qiang Zhai(翟慎强), Jun-Qi Liu(刘俊岐), Li-Jun Wang(王利军), Shu-Man Liu(刘舒曼), Feng-Qi Liu(刘峰奇), and Zhan-Guo Wang(王占国) Tunable characteristic of phase-locked quantum cascade laser arrays 2021 Chin. Phys. B 30 104201

[1] Faist J, Capasso F, Sivco D L, Sirtori C, Hutchinson A L and Cho A Y 1994 Science 264 5158
[2] Bai Y, Bandyopadhyay N, Tsao S, Slivken S and Razeghi M 2011 Appl. Phys. Lett. 98 18
[3] Lu Q Y, Wu D H, Sengupta S, Slivken S and Razeghi M 2016 Sci. Rep-Uk 6 23595
[4] Zhou W, Slivken S and Razeghi M 2018 Appl. Phys. Lett. 112 181106
[5] Zhou W J, Wu D H, Lu Q Y, Slivken S and Razeghi M 2018 Sci. Rep-Uk 8 14866
[6] Kirch J D, Chang C C, Boyle C, Mawst L J, Lindberg D, Earles T and Botez D 2015 Appl. Phys. Lett. 106 6
[7] Wang L, Zhang J C, Jia Z W, Zhao Y, Liu C W, Liu Y H, Zhai S Q, Zhuo N, Xu X G and Liu F Q 2016 Opt. Express 24 26
[8] Liu Y H, Zhang J C, Yan F L, Liu F Q, Zhuo N, Wang L J, Liu J Q and Wang Z G 2015 Appl. Phys. Lett. 106 142104
[9] Zhou W J, Lu Q Y, Wu D H, Slivken S and Razeghi M 2019 Opt. Express 27 11
[10] Hamamoto K and Jiang H S 2015 J. Phys. D: Appl. Phys. 48 38
[11] Soldano L B and Pennings E C M 1995 J. Lightwave Technol. 13 4
[12] Pennings E C M, Vanroijen R, Vanstralen M J N, Dewaard P J, Koumans R G M P and Verbeek B H 1994 IEEE Photonic Tech. Lett. 6 6
[13] Wang C A, Schwarz B, Siriani DF, Missaggia L J, Connors M K, Mansuripur T S, Calawa D R, McNulty D, Nickerson M, Donnelly J P, Creedon K and Capasso F 2017 IEEE J. Sel. Top. Quantum Electron. 23 6
[14] Mammez D, Vallon R, Parvitte B, Mammez MH, Carras M and Zeninari V 2014 Appl. Phys. B-Lasers Opt. 116 4
[15] Maulini R, Yarekha D A, Bulliard J M, Giovannini M and Faist J 2005 Opt. Lett. 30 19
[16] Mroziewicz B 2008 Opto-Electron Rev. 16 347
[17] Gmachl C, Straub A, Colombelli R, Capasso F, Sivco D L, Sergent A M, and Cho A Y 2002 IEEE J. Quantum Electron. 38 569

[1]	Broad gain, continuous-wave operation of InP-based quantum cascade laser at λ~11.8 μm Huan Wang(王欢), Jin-Chuan Zhang(张锦川), Feng-Min Cheng(程凤敏), Zeng-Hui Gu(顾增辉), Ning Zhuo(卓宁), Shen-Qiang Zhai(翟慎强), Feng-Qi Liu(刘峰奇), Jun-Qi Liu(刘俊岐), Shu-Man Liu(刘舒曼), and Zhan-Guo Wang(王占国). Chin. Phys. B, 2021, 30(12): 124202.
[2]	An improved arctangent algorithm based on phase-locked loop for heterodyne detection system Chun-Hui Yan(晏春回), Ting-Feng Wang(王挺峰), Yuan-Yang Li(李远洋), Tao Lv(吕韬), Shi-Song Wu(吴世松). Chin. Phys. B, 2019, 28(3): 030701.
[3]	Broad bandwidth interference filter-stabilized external cavity diode laser with narrow linewidth below 100 kHz Guan-Zhong Pan(潘冠中), Bao-Lu Guan(关宝璐), Chen Xu(徐晨), Peng-Tao Li(李鹏涛), Jia-Wei Yang(杨嘉炜), Zhen-Yang Liu(刘振杨). Chin. Phys. B, 2018, 27(1): 014204.
[4]	Wavelength-tunable prism-coupled external cavity passively mode-locked quantum-dot laser Wu Yan-Hua (吴艳华), Wu Jian (吴剑), Jin Peng (金鹏), Wang Fei-Fei (王飞飞), Hu Fa-Jie (胡发杰), Wei Heng (魏恒), Wang Zhan-Guo (王占国). Chin. Phys. B, 2015, 24(6): 068103.
[5]	Broadband and high-speed swept external-cavity laser using a quantum-dot superluminescent diode as gain device Hu Fa-Jie (胡发杰), Jin Peng (金鹏), Wu Yan-Hua (吴艳华), Wang Fei-Fei (王飞飞), Wei Heng (魏恒), Wang Zhan-Guo (王占国). Chin. Phys. B, 2015, 24(10): 104212.
[6]	Hybrid phase-locked loop with fast locking time and low spur in a 0.18-μm CMOS process Zhu Si-Heng (朱思衡), Si Li-Ming (司黎明), Guo Chao (郭超), Shi Jun-Yu (史君宇), Zhu Wei-Ren (朱卫仁). Chin. Phys. B, 2014, 23(7): 078401.
[7]	Pump-induced carrier envelope offset frequency dynamics and stabilization of an Yb-doped fiber frequency comb Zhao Jian (赵健), Li Wen-Xue (李文雪), Yang Kang-Wen (杨康文), Shen Xu-Ling (沈旭玲), Bai Dong-Bi (白东碧), Chen Xiu-Liang (陈修亮), Zeng He-Ping (曾和平). Chin. Phys. B, 2014, 23(12): 124206.
[8]	A grating-coupled external cavity InAs/InP quantum dot laser with 85-nm tuning range Wei Heng (魏恒), Jin Peng (金鹏), Luo Shuai (罗帅), Ji Hai-Ming (季海铭), Yang Tao (杨涛), Li Xin-Kun (李新坤), Wu Jian (吴剑), An Qi (安琪), Wu Yan-Hua (吴艳华), Chen Hong-Mei (陈红梅), Wang Fei-Fei (王飞飞), Wu Ju (吴巨), Wang Zhan-Guo (王占国). Chin. Phys. B, 2013, 22(9): 094211.
[9]	A 1550-nm linearly tunable CW single-mode external cavity diode laser based on a single-cavity all-dielectric thin-film Fabry–Pérot filter Xiao Xiao (肖啸), Lu Yuan-Fu (鲁远甫), Yu Feng-Qi (于峰崎), Jin Lei (金雷). Chin. Phys. B, 2013, 22(7): 077802.
[10]	A mode-locked external-cavity quantum-dot laser with a variable repetition rate Wu Jian (吴剑), Jin Peng (金鹏), Li Xin-Kun (李新坤), Wei Heng (魏恒), Wu Yan-Hua (吴艳华), Wang Fei-Fei (王飞飞), Chen Hong-Mei (陈红梅), Wu Ju (吴巨), Wang Zhan-Guo (王占国). Chin. Phys. B, 2013, 22(10): 104206.
[11]	Chip design of a 5.8-GHz fractional-N frequency synthesizer with a tunable G_m–C loop filter Huang Jhin-Fang (黄进芳), Liu Ron-Yi (刘荣宜), Lai Wen-Cheng (赖文政), Shin Chun-Wei (石钧纬), Hsu Chien-Ming (许剑铭 ). Chin. Phys. B, 2012, 21(8): 084210.
[12]	Broadband tunable external cavity laser using a bent-waveguide quantum-dot superluminescent diode as gain device Wu Jian(吴剑), Lü Xue-Qin(吕雪芹), Jin Peng(金鹏), Meng Xian-Quan(孟宪权), and Wang Zhan-Guo(王占国). Chin. Phys. B, 2011, 20(6): 064202.
[13]	A broadband external cavity tunable InAs/GaAs quantum dot laser by utilizing only the ground state emission LÜ Xue-Qin(吕雪芹), Jin Peng(金鹏), and Wang Zhan-Guo(王占国). Chin. Phys. B, 2010, 19(1): 018104.
[14]	Intensity modulation in single-mode microchip Nd:YAG lasers with asymmetric external cavity Tan Yi-Dong(谈宜东), Zhang Shu-Lian(张书练), Liu Wei-Xin(刘维新), and MaoWei(毛威). Chin. Phys. B, 2007, 16(4): 1020-1026.
[15]	New nonlinear dynamics in a semiconductor laser with optical self-feedback Wang Chun-Lin (王春林), Wu Jian (伍剑), Lin Jin-Tong (林金桐). Chin. Phys. B, 2002, 11(10): 1033-1036.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Tunable characteristic of phase-locked quantum cascade laser arrays

Cite this article:

Online attention