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Chin. Phys. B, 2016, Vol. 25(11): 117805    DOI: 10.1088/1674-1056/25/11/117805

Effect of Mo capping layers thickness on the perpendicular magnetic anisotropy in MgO/CoFeB based top magnetic tunnel junction structure

Yi Liu(刘毅)1, Kai-Gui Zhu(朱开贵)1,4, Hui-Cai Zhong(钟汇才)2, Zheng-Yong Zhu(朱正勇)3, Tao Yu(于涛)1, Su-De Ma(马苏德)1
1 School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China;
2 Integrated Circuit Advanced Process Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
3 Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
4 Key Laboratory of Micro-nano Measurement-Manipulation and Physics, Ministry of Education, Beihang University, Beijing 100191, China
Abstract  A detailed study of the magnetic characterizations of the top structure MgO/CoFeB/Mo is presented. The samples show strong perpendicular magnetic anisotropy (PMA) when the thickness of CoFeB is 0.9 nm and 1.1 nm. The saturation magnetic moment and interface anisotropy constant are 1566 emu/cm3 and 3.75 erg/cm2, respectively. The magnetic dead layer (MDL) is about 0.23 nm in this system. Furthermore, strong capping layer thickness dependence is also observed. The strong PMA of 1.1 nm CoFeB only exists in a Mo cap layer thickness window of 1.2-2 nm. To maintain PMA, the metal layer could not be too thin or thick in these multilayers. The oxidation and diffusion of the metal capping layer should be respectively responsibility for the degradation of PMA in these thin or thick metal capping layer samples.
Keywords:  perpendicular magnetic anisotropy      capping layer      effective magnetic anisotropy      magnetic tunnel junction  
Received:  04 July 2016      Revised:  10 August 2016      Accepted manuscript online: 
PACS:  78.67.Pt (Multilayers; superlattices; photonic structures; metamaterials)  
  75.70.Cn (Magnetic properties of interfaces (multilayers, superlattices, heterostructures))  
  75.70.Rf (Surface magnetism)  
  75.60.Nt (Magnetic annealing and temperature-hysteresis effects)  
Fund: Project supported by the National Fundamental Research Program of China (Grant No. 2011CB921804) and Beijing Key Subject Foundation of Condensed Matter Physics, China (Grant No. 0114023).
Corresponding Authors:  Zheng-Yong Zhu     E-mail:

Cite this article: 

Yi Liu(刘毅), Kai-Gui Zhu(朱开贵), Hui-Cai Zhong(钟汇才), Zheng-Yong Zhu(朱正勇), Tao Yu(于涛), Su-De Ma(马苏德) Effect of Mo capping layers thickness on the perpendicular magnetic anisotropy in MgO/CoFeB based top magnetic tunnel junction structure 2016 Chin. Phys. B 25 117805

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