SPECIAL TOPI—International Conference on Nanoscience & Technology, China 2013 |
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Quantum transport characteristics in single and multiple N-channel junctionless nanowire transistors at low temperatures |
Wang Hao (王昊), Han Wei-Hua (韩伟华), Ma Liu-Hong (马刘红), Li Xiao-Ming (李小明), Yang Fu-Hua (杨富华) |
Engineering Research Center for Semiconductor Integration Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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Abstract Single and multiple n-channel junctionless nanowire transistors (JNTs) are fabricated and experimentally investigated at variable temperatures. Clear current oscillations caused by the quantum-confinement effect are observed in the curve of drain current versus gate voltage acquired at low temperatures (10 K-100 K) and variable drain bias voltages (10 mV-90 mV). Transfer characteristics exhibit current oscillation peaks below flat-band voltage (VFB) at temperatures up to 75 K, which is possibly due to Coulomb-blocking from quantum dots, which are randomly formed by ionized dopants in the just opened n-type one-dimensional (1D) channel of silicon nanowires. However, at higher voltages than VFB, regular current steps are observed in single-channel JNTs, which corresponds to the fully populated subbands in the 1D channel. The subband energy spacing extracted from transconductance peaks accords well with theoretical predication. However, in multiple-channel JNT, only tiny oscillation peaks of the drain current are observed due to the combination of the drain current from multiple channels with quantum-confinement effects.
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Received: 04 September 2013
Revised: 17 February 2014
Accepted manuscript online:
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PACS:
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81.07.Gf
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(Nanowires)
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85.30.Tv
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(Field effect devices)
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73.63.Hs
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(Quantum wells)
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07.20.Mc
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(Cryogenics; refrigerators, low-temperature detectors, and other low-temperature equipment)
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Fund: Project supported partly by the National Basic Research Program of China (Grant No. 2010CB934104) and the National Natural Science Foundation of China (Grant Nos. 61376069 and 61327813). |
Corresponding Authors:
Han Wei-Hua
E-mail: weihua@semi.ac.cn
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Cite this article:
Wang Hao (王昊), Han Wei-Hua (韩伟华), Ma Liu-Hong (马刘红), Li Xiao-Ming (李小明), Yang Fu-Hua (杨富华) Quantum transport characteristics in single and multiple N-channel junctionless nanowire transistors at low temperatures 2014 Chin. Phys. B 23 088107
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