Tunable structural color of anodic tantalum oxide films

doi:10.1088/1674-1056/21/8/088101

Abstract Tantalum (Ta) oxide films with tunable structural color were fabricated facilely using anodic oxidation. The structure, components, and surface valence states of the oxide films were investigated by using gazing incidence X-ray diffractometry, X-ray photoelectron microscopy, and surface analytical techniques. Their thickness and optical properties were studied by using spectroscopic ellipsometry and total reflectance spectrum. Color was accurately defined using L^*a^*b^* scale. The thickness of compact Ta₂O₅ films was linearly dependent on anodizing voltage. The film color was tunable by adjusting the anodic voltage. The difference in color appearance is resulted from the interference behavior between the interfaces of air-oxide and oxide-metal.

Keywords: anodic tantalum oxide structural color spectroscopic ellipsometry optical interference

Received: 06 February 2012
Revised: 25 February 2012
Accepted manuscript online:

PACS:	81.05.Gc	(Amorphous semiconductors)
	42.25.Hz	(Interference)
	78.20.-e	(Optical properties of bulk materials and thin films)
	78.20.Ci	(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))

Corresponding Authors: Liang Chang-Hao
E-mail: chliang@issp.ac.cn

Cite this article:

Sheng Cui-Cui (盛翠翠), Cai Yun-Yu (蔡云雨), Dai En-Mei (代恩梅), Liang Chang-Hao (梁长浩 ) Tunable structural color of anodic tantalum oxide films 2012 Chin. Phys. B 21 088101

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Tunable structural color of anodic tantalum oxide films

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