Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

doi:10.1088/1674-1056/20/1/015207

Abstract This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states (4s[3/2]₂, 4s'[1/2]₀), is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines (located at 696.5 nm and 750.4 nm) are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.

Keywords: capacitively coupled plasma collisional-radiative model optical emission spectroscopy Langmuir probe

Received: 07 April 2010
Revised: 02 August 2010
Accepted manuscript online:

PACS:	52.80.Pi	(High-frequency and RF discharges)
	52.70.Kz	(Optical (ultraviolet, visible, infrared) measurements)
	52.25.Os	(Emission, absorption, and scattering of electromagnetic radiation ?)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 10635010 and 10775103).

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Yu Yi-Qing(虞一青), Xin Yu(辛煜), and Ning Zhao-Yuan(宁兆元) Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model 2011 Chin. Phys. B 20 015207

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Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

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