Spectroscopic ellipsometric study of the optical properties of Ag2O film prepared by direct-current magnetron reactive sputtering

doi:10.1088/1674-1056/19/9/090701

Abstract The Ag₂O film, as-deposited by direct-current magnetron reactive sputtering at a substrate temperature of 150 ℃, clearly shows a preferential orientation (111), and is capable of lowering the threshold value of the thermal decomposition temperature to about 200 ℃, which is helpful to its application in optical and magneto-optical storage. This paper fits its optical constants in terms of a general oscillator model by using measured ellipsometric parameters. The fitted oscillator energy 2.487 eV is close to the optical direct interband transition energy value of the Ag₂O film determined by Tauc equation; whereas, the fitted oscillator energy 4.249 eV is far from the fitted plasma oscillator energy 4.756 eV by single-oscillator energy. The photoluminescence spectrum centred at about 2.31 eV indicates a direct-energy gap photoluminescence mechanism of the Ag₂O film.

Keywords: Ag₂O film spectroscopic ellipsometry general oscillator model single-oscillator model

Received: 15 October 2009
Revised: 09 December 2009
Accepted manuscript online:

PACS:	0760F
	7865P
	4270Q
	3360F

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60807001) and Foundation of Henan Educational Committee (Grant No. 2010A140017).

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Gao Xiao-Yong(郜小勇), Feng Hong-Liang(冯红亮), Ma Jiao-Min(马姣民), and Zhang Zeng-Yuan(张增院) Spectroscopic ellipsometric study of the optical properties of Ag₂O film prepared by direct-current magnetron reactive sputtering 2010 Chin. Phys. B 19 090701

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Spectroscopic ellipsometric study of the optical properties of Ag2O film prepared by direct-current magnetron reactive sputtering

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Spectroscopic ellipsometric study of the optical properties of Ag₂O film prepared by direct-current magnetron reactive sputtering