Please wait a minute...
Chinese Physics, 2005, Vol. 14(11): 2256-2261    DOI: 10.1088/1009-1963/14/11/020
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

Calculation of ion energy distributions of argon excimer ions generated in helicon plasma

Fang Tong-Zhen (房同珍), Jiang Nan (江南), Wang Long (王龙)
Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
Abstract  A program is developed to calculate the ion energy distributions (IEDs) of Ar2+ making use of a simplified kinetic model with a combination of Monte Carlo method. Several coefficients are used to realize good match between the calculated and measured results. Some important assumptions are confirmed: argon excimer ions have short lifetime, hence they are formed in a short range before the collecting electrode. The excimer ions that encounter collisions will be discarded because they turn to other ion species after they collide with argon atoms. From the calculated results some plasma parameters such as the cross section or neutral density in discharge could be evaluated.
Keywords:  IED      helicon      plasma sheath  
Received:  11 November 2005      Revised:  18 July 2005      Accepted manuscript online: 
PACS:  52.40.Kh (Plasma sheaths)  
  52.25.Dg (Plasma kinetic equations)  
  52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons)  

Cite this article: 

Fang Tong-Zhen (房同珍), Jiang Nan (江南), Wang Long (王龙) Calculation of ion energy distributions of argon excimer ions generated in helicon plasma 2005 Chinese Physics 14 2256

[1] Propagation and modulational instability of Rossby waves in stratified fluids
Xiao-Qian Yang(杨晓倩), En-Gui Fan(范恩贵), and Ning Zhang(张宁). Chin. Phys. B, 2022, 31(7): 070202.
[2] Plasma-wave interaction in helicon plasmas near the lower hybrid frequency
Yide Zhao(赵以德), Jinwei Bai(白进纬), Yong Cao(曹勇), Siyu Wu(吴思宇), Eduardo Ahedo, Mario Merino, and Bin Tian(田滨). Chin. Phys. B, 2022, 31(7): 075203.
[3] Efficient implementation of x-ray ghost imaging based on a modified compressive sensing algorithm
Haipeng Zhang(张海鹏), Ke Li(李可), Changzhe Zhao(赵昌哲), Jie Tang(汤杰), and Tiqiao Xiao(肖体乔). Chin. Phys. B, 2022, 31(6): 064202.
[4] Loss prediction of three-level amplified spontaneous emission sources in radiation environment
Shen Tan(谭深), Yan Li(李彦), Hao-Shi Zhang(张浩石), Xiao-Wei Wang(王晓伟), and Jing Jin(金靖). Chin. Phys. B, 2022, 31(6): 064211.
[5] Neutron activation cross section data library
Xiao-Long Huang(黄小龙), Zhi-Gang Ge(葛智刚), Yong-Li Jin(金永利), Hai-Cheng Wu(吴海成), Xi Tao(陶曦),Ji-Min Wang(王记民), Li-Le Liu(刘丽乐), Yue Zhang(张玥), and Xiao-Fei Wu(吴小飞). Chin. Phys. B, 2022, 31(6): 060102.
[6] Pump pulse characteristics of quasi-continuous-wave diode-side-pumped Nd:YAG laser
Zexin Song(宋泽鑫), Qi Bian(卞奇), Yu Shen(申玉), Keling Gong(龚柯菱), Nan Zong(宗楠), Qingshuang Zong(宗庆霜), Yong Bo(薄勇), and Qinjun Peng(彭钦军). Chin. Phys. B, 2022, 31(5): 054208.
[7] Pseudospin symmetric solutions of the Dirac equation with the modified Rosen—Morse potential using Nikiforov—Uvarov method and supersymmetric quantum mechanics approach
Wen-Li Chen(陈文利) and I B Okon. Chin. Phys. B, 2022, 31(5): 050302.
[8] Evolution of defects and deformation mechanisms in different tensile directions of solidified lamellar Ti-Al alloy
Yutao Liu(刘玉涛), Tinghong Gao(高廷红), Yue Gao(高越), Lianxin Li(李连欣), Min Tan(谭敏), Quan Xie(谢泉), Qian Chen(陈茜), Zean Tian(田泽安), Yongchao Liang(梁永超), and Bei Wang(王蓓). Chin. Phys. B, 2022, 31(4): 046105.
[9] Synthesis of SiC/graphene nanosheet composites by helicon wave plasma
Jia-Li Chen(陈佳丽), Pei-Yu Ji(季佩宇), Cheng-Gang Jin(金成刚), Lan-Jian Zhuge(诸葛兰剑), and Xue-Mei Wu(吴雪梅). Chin. Phys. B, 2021, 30(7): 075201.
[10] Attenuation characteristics of obliquely incident electromagnetic wave in weakly ionized dusty plasma based on modified Bhatnagar-Gross-Krook collision model
Zhaoying Wang(王召迎), Lixin Guo(郭立新), and Jiangting Li(李江挺). Chin. Phys. B, 2021, 30(4): 045203.
[11] Breather solutions of modified Benjamin-Bona-Mahony equation
G T Adamashvili. Chin. Phys. B, 2021, 30(2): 020503.
[12] Novel fast-switching LIGBT with P-buried layer and partial SOI
Haoran Wang(王浩然), Baoxing Duan(段宝兴), Licheng Sun(孙李诚), and Yintang Yang(杨银堂). Chin. Phys. B, 2021, 30(2): 027302.
[13] Enhanced gated-diode-triggered silicon-controlled rectifier for robust electrostatic discharge (ESD) protection applications
Wenqiang Song(宋文强), Fei Hou(侯飞), Feibo Du(杜飞波), Zhiwei Liu(刘志伟), Juin J. Liou(刘俊杰). Chin. Phys. B, 2020, 29(9): 098502.
[14] Stable soliton propagation in a coupled (2+1) dimensional Ginzburg-Landau system
Li-Li Wang(王丽丽), Wen-Jun Liu(刘文军). Chin. Phys. B, 2020, 29(7): 070502.
[15] Approximate solution to the time-dependent Kratzer plus screened Coulomb potential in the Feinberg-Horodecki equation
Mahmoud Farout, Ramazan Sever, Sameer M. Ikhdair. Chin. Phys. B, 2020, 29(6): 060303.
No Suggested Reading articles found!