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Tunable characteristic of phase-locked quantum cascade laser arrays |
Zeng-Hui Gu(顾增辉)1,2, Jin-Chuan Zhang(张锦川)1,†, Huan Wang(王欢)1,2, Peng-Chang Yang(杨鹏昌)1,2, Ning Zhuo(卓宁)1, Shen-Qiang Zhai(翟慎强)1, Jun-Qi Liu(刘俊岐)1,2, Li-Jun Wang(王利军)1,2, Shu-Man Liu(刘舒曼)1,2, Feng-Qi Liu(刘峰奇)1,2,‡, and Zhan-Guo Wang(王占国)1,2 |
1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China; 2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China |
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Abstract A multimode interference (MMI) structure is designed to simplify the fabrication of quantum cascade laser (QCL) phase-locked arrays. The MMI geometry is optimized with a sufficient output channel distance to accommodate conventional photolithography and wet etching process by which power amplifier array is fabricated without using the complicated two-step etching-regrowth or dry etching technique. The far-field pattern with periodically modulated peaks reveals that the beams from the arrays are phase-locked. Furthermore, the frequency tuning performance of the MMI-based phase-locked arrays is studied using the Littrow-configuration external cavity structure. A wavelength tuning range of more than 60 cm-1 is demonstrated, which will eventually realize the high power, frequency tunable, large-scale phase-locked arrays, and their application in spectroscopy.
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Received: 19 January 2021
Revised: 01 March 2021
Accepted manuscript online: 05 March 2021
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PACS:
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42.25.Bs
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(Wave propagation, transmission and absorption)
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42.55.Px
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(Semiconductor lasers; laser diodes)
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42.60.Fc
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(Modulation, tuning, and mode locking)
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42.82.Et
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(Waveguides, couplers, and arrays)
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Fund: Project supported by the National Basic Research Program of China (Grant Nos. 2018YFA0209103 and 2018YFB2200504), the National Natural Science Foundation of China (Grant Nos. 61991430, 61774146, 61790583, 61674144, 61774150, and 61805168), the Beijing Municipal Science & Technology Commission, China (Grant No. Z201100004020006), and the Key Projects of the Chinese Academy of Sciences (Grant Nos. 2018147, YJKYYQ20190002, QYZDJ-SSW-JSC027, and XDB43000000). |
Corresponding Authors:
Jin-Chuan Zhang, Feng-Qi Liu
E-mail: zhangjinchuan@semi.ac.cn;fqliu@semi.ac.cn
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Cite this article:
Zeng-Hui Gu(顾增辉), Jin-Chuan Zhang(张锦川), Huan Wang(王欢), Peng-Chang Yang(杨鹏昌), Ning Zhuo(卓宁), Shen-Qiang Zhai(翟慎强), Jun-Qi Liu(刘俊岐), Li-Jun Wang(王利军), Shu-Man Liu(刘舒曼), Feng-Qi Liu(刘峰奇), and Zhan-Guo Wang(王占国) Tunable characteristic of phase-locked quantum cascade laser arrays 2021 Chin. Phys. B 30 104201
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