CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV |
Chun Guo(郭春)1,2, Bin-Cheng Li(李斌成)3, Ming-Dong Kong(孔明东)1,4, Da-Wei Lin(林大伟)1 |
1 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China; 2 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu 610209, China; 3 School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China; 4 University of Chinese Academy of Sciences, Beijing 100049, China |
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Abstract Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.
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Received: 08 April 2019
Revised: 12 September 2019
Accepted manuscript online:
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PACS:
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78.20.-e
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(Optical properties of bulk materials and thin films)
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42.79.Fm
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(Reflectors, beam splitters, and deflectors)
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78.40.-q
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(Absorption and reflection spectra: visible and ultraviolet)
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Fund: Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247). |
Corresponding Authors:
Chun Guo
E-mail: guochunyouxiang@126.com
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Cite this article:
Chun Guo(郭春), Bin-Cheng Li(李斌成), Ming-Dong Kong(孔明东), Da-Wei Lin(林大伟) Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV 2019 Chin. Phys. B 28 117801
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[1] |
Hennessy J, Moore C S, Balasubramanian K, Jewell A D, France K and Nikzad S 2017 J. Vac. Sci. Technol. A 35 041512
|
[2] |
Hoyo J D and Quijada M 2017 Proc. SPIE 10372 1037204
|
[3] |
Hennessy J, Moore C S, Balasubramanian K, Jewell A D, Carter C, France K and Nikzad S 2017 Proc. SPIE 10401 1040119
|
[4] |
Wang X D, Chen B, Wang H F, He F, Zheng X, He L P, Chen B, Liu S J, Cui Z X, Yang X H and Li Y P 2015 Sci. Rep. 5 1
|
[5] |
Quijada M A, Hoyo J D, Boris D R and WaltonS G 2017 Proc. SPIE 10398 103980Z
|
[6] |
Fleming B, Quijada M, Hennessy J, Egan A, Hoyo J D, Hicks B A, Wiley J, Kruczek N, Erickson N and France K 2017 Appl. Opt. 56 9941
|
[7] |
Wilbrandt S, Stenzel O, Nakamura H, Wulff-Molder D, Duparré A and Kaiser N 2014 Appl. Opt. 53 A125
|
[8] |
Yang Y, Kushima A, Han W Z, Xin H L and Li J 2018 Nano Lett. 18 2492
|
[9] |
Marcos L V R, Larruquert J I, Méndez J A, Gutiérrez-Luna N, Espinosa-Yáñez L, Honrado-Benítez C, Chavero-Royán J and Perea-Abarca B 2018 Opt. Express 26 9363
|
[10] |
Yang M H, Gatto A and Kaiser N 2006 Appl. Opt. 45 178
|
[11] |
Quijada M A, Rice S and Mentzell E 2012 Proc. SPIE 8450 84502H
|
[12] |
Quijada M A, Hoyo J D and Rice S 2014 Proc. SPIE 9144 9144G
|
[13] |
Zaczek C, Müllender S, Enkisch H and Bijkerk F 2008 Proc. SPIE 7101 71010X
|
[14] |
Balasubramanian K, Hennessy J, Raouf N, Nikzad S, HoyoJ D and Quijada M 2017 Proc. SPIE 10398 103980X
|
[15] |
Wang F L, Zhou D W, Zhang J S and Wang Z S 2015 Opt. Precis. Eng. 23 913(in chinese)
|
[16] |
Fernández-Perea M, Larruquert J I, Aznárez J A, Pons A and Méndez J A 2007 Appl. Opt. 46 4871
|
[17] |
Hennessy J, Balasubramanian K, MooreC S, Jewell A D, Nikzad S, France K and Quijada M 2016 J. Astron. Instrum. 2 041206
|
[18] |
Moore C S, Hennessy J, Jewell A D, Nikzad S and France K 2016 Proc. SPIE 9912 99122U
|
[19] |
Palik E D 1998 Handbook of Optical Constants of Solids II (New York, Academic Press), pp. 369-383
|
[20] |
Guo C, Kong M D, Lin D W, Liu C D and Li B C 2013 Opt. Express 21 960
|
[21] |
Wood O R, Craighead H G, Sweeney J E and Maloney P J 1984 Appl. Opt. 23 3644
|
[22] |
Liu M C, Lee C C, Kaneko M, Nakahira K and Takano Y 2006 Appl. Opt. 45 7319
|
[23] |
Kaiser N 2002 Appl. Opt. 41 3053
|
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