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Chin. Phys. B, 2019, Vol. 28(11): 117801    DOI: 10.1088/1674-1056/ab457a
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

Chun Guo(郭春)1,2, Bin-Cheng Li(李斌成)3, Ming-Dong Kong(孔明东)1,4, Da-Wei Lin(林大伟)1
1 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;
2 Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Chengdu 610209, China;
3 School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China;
4 University of Chinese Academy of Sciences, Beijing 100049, China
Abstract  Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.
Keywords:  protected-Al mirrors      reflectance      vacuum ultraviolet      MgF2  
Received:  08 April 2019      Revised:  12 September 2019      Accepted manuscript online: 
PACS:  78.20.-e (Optical properties of bulk materials and thin films)  
  42.79.Fm (Reflectors, beam splitters, and deflectors)  
  78.40.-q (Absorption and reflection spectra: visible and ultraviolet)  
Fund: Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).
Corresponding Authors:  Chun Guo     E-mail:  guochunyouxiang@126.com

Cite this article: 

Chun Guo(郭春), Bin-Cheng Li(李斌成), Ming-Dong Kong(孔明东), Da-Wei Lin(林大伟) Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV 2019 Chin. Phys. B 28 117801

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