1 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2 University of Chinese Academy of Sciences, Beijing 100049, China
Abstract We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers (VCSELs) to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer (SiO2) is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. Destructive etching techniques (dry/wet) or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.
Fund: Project supported by the National Key Research and Development Project, China (Grant No. 2017YFB0503200), the National Natural Science Foundation of China (Grant Nos. 61434005, 61474118, 11774343, and 11674314), the Science and Technology Program of Jilin Province, China (Grant No. 20160203013GX), and the Youth Innovation Promotion Association, China (Grant No. 2017260).
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