Comparison of total dose effects on SiGe heterojunction bipolar transistors induced by different swift heavy ion irradiation

doi:10.1088/1674-1056/23/11/116104

Abstract

The degradations in NPN silicon-germanium (SiGe) heterojunction bipolar transistors (HBTs) were fully studied in this work, by means of 25-MeV Si, 10-MeV Cl, 20-MeV Br, and 10-MeV Br ion irradiation, respectively. Electrical parameters such as the base current (I_B), current gain (β), neutral base recombination (NBR), and Early voltage (V_A) were investigated and used to evaluate the tolerance to heavy ion irradiation. Experimental results demonstrate that device degradations are indeed radiation-source-dependent, and the larger the ion nuclear energy loss is, the more the displacement damages are, and thereby the more serious the performance degradation is. The maximum degradation was observed in the transistors irradiated by 10-MeV Br. For 20-MeV and 10-MeV Br ion irradiation, an unexpected degradation in I_C was observed and Early voltage decreased with increasing ion fluence, and NBR appeared to slow down at high ion fluence. The degradations in SiGe HBTs were mainly attributed to the displacement damages created by heavy ion irradiation in the transistors. The underlying physical mechanisms are analyzed and investigated in detail.

Keywords: heavy ion irradiation displacement damage SiGe heterojunction bipolar transistor

Received: 02 April 2014
Revised: 03 June 2014
Accepted manuscript online:

PACS:	61.80.-x	(Physical radiation effects, radiation damage)
	73.40.Lq	(Other semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)

Fund:

Project supported by the National Natural Science Foundation of China (Grant No. 60976013).

Corresponding Authors: Sun Ya-Bin
E-mail: sunyb10@mails.tsinghua.edu.cn

Cite this article:

Sun Ya-Bin (孙亚宾), Fu Jun (付军), Xu Jun (许军), Wang Yu-Dong (王玉东), Zhou Wei (周卫), Zhang Wei (张伟), Cui Jie (崔杰), Li Gao-Qing (李高庆), Liu Zhi-Hong (刘志弘) Comparison of total dose effects on SiGe heterojunction bipolar transistors induced by different swift heavy ion irradiation 2014 Chin. Phys. B 23 116104

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Comparison of total dose effects on SiGe heterojunction bipolar transistors induced by different swift heavy ion irradiation

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