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Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves |
Xiao Xia (肖夏), Tao Ye (陶冶), Sun Yuan (孙远) |
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China |
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Abstract The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical characteristics of the thin low dielectric constant (low-k) film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is investigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young's moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square (RMS) of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.
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Received: 20 November 2013
Revised: 26 May 2014
Accepted manuscript online:
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PACS:
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68.35.Ct
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(Interface structure and roughness)
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43.35.+d
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(Ultrasonics, quantum acoustics, and physical effects of sound)
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78.20.Bh
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(Theory, models, and numerical simulation)
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Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60876072) and the Tianjin Research Program of Application Foundation and Advanced Technology, China (Grant No. 10JCZDJC15500). |
Corresponding Authors:
Xiao Xia
E-mail: xiaxiao@tju.edu.cn
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About author: 68.35.Ct; 43.35.+d; 78.20.Bh |
Cite this article:
Xiao Xia (肖夏), Tao Ye (陶冶), Sun Yuan (孙远) Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves 2014 Chin. Phys. B 23 106803
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| [1] | Maex K, Baklanov M R, Shamiryan D, Iacopi F, Brongersma and Yanovitskaya Z S 2003 J. Appl. Phys. 93 8793
|
|
| [2] | McGahay V 2010 Materials 3 536
|
|
| [3] | van Driel W D 2007 Microelectron. Reliab. 47 1969
|
|
| [4] | Hoofman R J O M, Michelon J, Bancken P H L, Daamen R, Verheijden G J A M, Arnal V, Hinsinger O, Gosset L G, Humbert A, Besling W F A, Goldberg C, Fox R, Michaelson L, Guedj C, Guillaumond J F, Jousseaume V, Arnaud L, Gravesteijn D J, Torres J and Passemard G 2005 Proceedings of the IEEE 2005 International Interconnect Technology Conference, June 6-8, 2005, California, USA, p. 85
|
|
| [5] | Herbert E G, Tenhaeff W E, Dudney N J and Pharr G M 2011 Thin Solid Films 520 413
|
|
| [6] | Wittkowski T, Jorzick J, Jung K, Hillebrands B, Keunecke M and Bewilogua K 2002 J. Appl. Phys. 91 2729
|
|
| [7] | Randall N X and Consiglio R 2000 Rev. Sci. Instrum. 71 2796
|
|
| [8] | Shan X M, Xiao X and Liu Y L 2011 Adv. Sci. Lett. 4 1230
|
|
| [9] | Xiao X, Sun Y and Shan X M 2012 Surf. Coat. Technol. 207 240
|
|
| [10] | Schneider D, Hammer A and Jurisch M 1999 Semicond. Sci. Technol. 14 93
|
|
| [11] | Liu Y L, Xiao X, Shan X M and Fu S C 2009 Photonics and Optoelectronics, August 14-16, 2009, Wuhan, China, p. 69
|
|
| [12] | Vaz F, Carvalho S, Rebouta L, Silva M Z, Paul A and Schneider D 2002 Thin Solid Films 408 160
|
|
| [13] | Xiao X, You X Y and Yao S Y 2006 Microelectron. J. 37 1052
|
|
| [14] | Xiao X, Shan X M, Kayaba Y, Kohmura K, Tanaka H, Kikkawa T 2011 Microelectron. Eng. 88 666
|
|
| [15] | Hastings F D, Schneider J B and Broschat S L 1995 IEEE Trans. Anten. Propag. 43 1183
|
|
| [16] | Leung T, Qin L and Chi H C 1999 Microwave Conference, November 30-December 3, 1999, Singapore, p. 584
|
|
| [17] | Flannery C M and von Kiedrowski H 2002 Ultrasonics 40 83
|
|
| [18] | Fang W X, Huang Q W, Liu X and Qiu C X 2011 Quality, Reliability, Risk, Maintenance, and Safety Engineering (ICQR2MSE), June 17-19, 2011, Xi'an, China, p. 1000
|
|
| [19] | Thomas T R 1999 Roughness Surface, 2nd edn. (London: Imperial College Press) p. 157
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