Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

doi:10.1088/1674-1056/23/3/030701

Abstract A series of <103>-oriented aluminum-doped zinc oxide (AZO) films were deposited on glass substrates via direct-current pulse magnetron reactive sputtering at different O₂-to-Ar gas flow ratios (GFRs). The optical properties of the films were characterized using the fitted optical constants in the general oscillator model (which contains two Psemi-Tri oscillators) through the use of measured ellipsometric parameters. The refractive index dispersion data below the interband absorption edge were analyzed using a single-oscillator model. The fitted optical energy gap obtained using the single-oscillator model clearly shows a blue shift, followed by a red shift, as the GFR increases from 0.9/18 to 2.1/18. This shift can be attributed to the change in the free electron concentration of the film, which is closely related to the film stress. In addition, the fitted β value indicates that the AZO film falls under the ionic class. The photoluminescence spectrum indicates a photoluminescence mechanism of the direct and wide energy gap semiconductor.

Keywords: AZO film spectroscopic ellipsometry single-oscillator model

Received: 07 June 2013
Revised: 04 September 2013
Accepted manuscript online:

PACS:	07.60.Fs	(Polarimeters and ellipsometers)
	78.20.-e	(Optical properties of bulk materials and thin films)
	77.55.hf	(ZnO)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the Foundation of Young Key Teachers from University of Henan Province, China (Grant No. 2011GGJS-008), the Foundation of Graduate Education Support of Zhengzhou University, China, and the Foundation of Graduate Innovation of Zhengzhou University, China (Grant No. 12L00104).

Corresponding Authors: Gao Xiao-Yong
E-mail: xygao@zzu.edu.cn

Cite this article:

Gao Xiao-Yong (郜小勇), Chen Chao (陈超), Zhang Sa (张飒) Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering 2014 Chin. Phys. B 23 030701

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Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

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