Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

doi:10.1088/1674-1056/21/1/016203

Abstract The purpose of the present work is to quantify the influences of the discrete nature, the surface effects, and the large deformation on the bending resonant properties of long and ultrathin 〈100〉 silicon nanocantilevers. We accomplish this by using an analytical semi-continuum Keating model within the framework of nonlinear, finite deformation kinematics. The semi-continuum model shows that the elastic behaviors of the silicon nanocantilevers are size-dependent and surface-dependent, which agrees well with the molecular dynamics results. It also indicates that the dominant effect on the fundamental resonant frequency shift of the silicon nanocantilever is adsorption-induced surface stress, followed by the discrete nature and surface reconstruction, whereas surface relaxation has the least effect. In particular, it is found that a large deformation tends to increase the nonlinear fundamental frequency of the silicon nanocantilever, depending not only on its size but also on the surface effects. Finally, the resonant frequency shifts due to the adsorption-induced surface stress predicted by the current model are quantitatively compared with those obtained from the experimental measurement and the other existing approach. It is noticed that the length-to-thickness ratio is the key parameter that correlates the deviations in the resonant frequencies predicted from the current model and the empirical formula.

Keywords: resonant properties elastic properties surface effects silicon nanocantilevers

Received: 10 August 2011
Revised: 14 October 2011
Accepted manuscript online:

PACS:	62.25.-g	(Mechanical properties of nanoscale systems)
	62.40.+i	(Anelasticity, internal friction, stress relaxation, and mechanical resonances)
	68.35.B-	(Structure of clean surfaces (and surface reconstruction))
	61.46.Km	(Structure of nanowires and nanorods (long, free or loosely attached, quantum wires and quantum rods, but not gate-isolated embedded quantum wires))

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 41075026), the Open Research Fund of Key Laboratory of MEMS of Ministry of Education, Southeast University, China (Grant Nos. 2009-03 and 2010-02), the Special Fund for Meteo

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Zhang Jia-Hong(张加宏), Li Min(李敏), Gu Fang(顾芳), and Liu Qing-Quan(刘清惓) Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers 2012 Chin. Phys. B 21 016203

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Influences of surface effects and large deformation on the resonant properties of ultrathin silicon nanocantilevers

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