Abstract The growth of diamond-like carbon (DLC) films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.
Received: 09 November 2006
Revised: 09 January 2007
Accepted manuscript online:
Fund: Project supported by the National Natural
Science Foundation of China (Grant Nos~50390060 and 50675111) and the
State Key Development Program for Basic Research of
China (Grant No~2003CB716201).
Cite this article:
Ma Tian-Bao(马天宝), Hu Yuan-Zhong(胡元中), and Wang Hui(王慧) Role of atomic transverse migration in growth of diamond-like carbon films 2007 Chinese Physics 16 2798
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