Study of nanocrystalline Fe－Al－N soft magnetic thin films

doi:10.1088/1009-1963/11/7/315

Abstract

Abstract Fe－Al－N films were fabricated by reactive sputtering using a radio-frequency magnetron sputtering system. The effects of Al and N content and annealing temperature on microstructure and magnetic properties were investigated. The Fe－Al－N films, which have good soft magnetic properties, consist of nanocrystalline α-Fe grains and a small amount of other phases in the boundaries of $\alpha$-Fe grains. The average $\alpha$-Fe grain size is about 10－15nm. A slight amount of Fe－N and Al－N compounds precipitate in the boundaries of $\alpha$-Fe grains and suppress their growth. Annealing improves the soft magnetic properties slightly by releasing the residual stress and reducing defects.

Keywords: soft magnetic properties nanocrystalline lattice deformation

Received: 26 November 2001
Revised: 19 January 2002
Accepted manuscript online:

PACS:	75.70.Ak	(Magnetic properties of monolayers and thin films)
	75.50.Tt	(Fine-particle systems; nanocrystalline materials)
	61.72.Mm	(Grain and twin boundaries)

Fund: Project supported by the National Natural Science Foundation of China (Grant No 10174028).

Cite this article:

Xie Tian (谢天), Zheng Dai-Shun (郑代顺), Li Xiao-Hong (李晓红), Ma Yun-Gui (马云贵), Wei Fu-Lin (魏福林), Yang Zheng (杨正) Study of nanocrystalline Fe－Al－N soft magnetic thin films 2002 Chinese Physics 11 725

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Study of nanocrystalline Fe－Al－N soft magnetic thin films

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