Abstract Fe-Al-N films were fabricated by reactive sputtering using a radio-frequency magnetron sputtering system. The effects of Al and N content and annealing temperature on microstructure and magnetic properties were investigated. The Fe-Al-N films, which have good soft magnetic properties, consist of nanocrystalline α-Fe grains and a small amount of other phases in the boundaries of $\alpha$-Fe grains. The average $\alpha$-Fe grain size is about 10-15nm. A slight amount of Fe-N and Al-N compounds precipitate in the boundaries of $\alpha$-Fe grains and suppress their growth. Annealing improves the soft magnetic properties slightly by releasing the residual stress and reducing defects.
Received: 26 November 2001
Revised: 19 January 2002
Accepted manuscript online:
PACS:
75.70.Ak
(Magnetic properties of monolayers and thin films)
Fund: Project supported by the National Natural Science Foundation of China (Grant No 10174028).
Cite this article:
Xie Tian (谢天), Zheng Dai-Shun (郑代顺), Li Xiao-Hong (李晓红), Ma Yun-Gui (马云贵), Wei Fu-Lin (魏福林), Yang Zheng (杨正) Study of nanocrystalline Fe-Al-N soft magnetic thin films 2002 Chinese Physics 11 725
A new modulated structure in α-Fe2O3 nanowires Cai Rong-Sheng (蔡鎔声), Shang Lei (商蕾), Liu Xue-Hua (刘雪华), Wang Yi-Qian (王乙潜), Yuan Lu (袁露), Zhou Guang-Wen (周光文). Chin. Phys. B, 2013, 22(10): 107401.
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