PERFORMANCE OF A COMPACT ECR SOURCE FOR MBE EQUIPMENT
YAO XIN-ZI (姚鑫兹)a, HUANG YUN-HENG (黄运衡)b, JI TIAN-REN (季天仁)c, MENG LIN (蒙林)c, LIU HUA (刘华)c
a Institute of Physics, Academia Sinica, Beijing 100080, China ; b Institute of Semiconductors, Academia Sinica, Beijing 100083, China; c High Energy Electronics Research Institute, University of Electronics Science and Technology of China, Chengdu 610054 , China
Abstract A compact electron cyclotron resonance plasma source has been developed for molecular beaut epitaxy equipment. Faraday cup and Langmuir probe were used to measure the ion current densities, electron temperatures, ion densities, and plasma potentials. The ion current densities as function of pressure and microwave power have been studied.
Received: 23 January 1995
Accepted manuscript online:
YAO XIN-ZI (姚鑫兹), HUANG YUN-HENG (黄运衡), JI TIAN-REN (季天仁), MENG LIN (蒙林), LIU HUA (刘华) PERFORMANCE OF A COMPACT ECR SOURCE FOR MBE EQUIPMENT 1995 Acta Physica Sinica (Overseas Edition) 4 601
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
