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Acta Physica Sinica (Overseas Edition), 1994, Vol. 3(8): 617-622    DOI: 10.1088/1004-423X/3/8/008
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

A MBE ON-LINE OPTICAL MODULATION PHOTOREFLECTANCE ANALYSIS SYSTEM

HE YUAN-JIN (何元金), DONG YUE-MEI (董悦梅), DUAN XIAO-DONG (段晓东)
Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
Abstract  An on-line optical modulation photoreflectance (PR) spectroscopy analysis system asso-cinted with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjust-ment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.
Received:  07 April 1993      Accepted manuscript online: 
PACS:  78.20.-e (Optical properties of bulk materials and thin films)  
  81.15.Hi (Molecular, atomic, ion, and chemical beam epitaxy)  
  68.55.A- (Nucleation and growth)  
  78.66.Fd (III-V semiconductors)  

Cite this article: 

HE YUAN-JIN (何元金), DONG YUE-MEI (董悦梅), DUAN XIAO-DONG (段晓东) A MBE ON-LINE OPTICAL MODULATION PHOTOREFLECTANCE ANALYSIS SYSTEM 1994 Acta Physica Sinica (Overseas Edition) 3 617

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