Abstract An on-line optical modulation photoreflectance (PR) spectroscopy analysis system asso-cinted with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjust-ment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.
Received: 07 April 1993
Accepted manuscript online:
PACS:
78.20.-e
(Optical properties of bulk materials and thin films)
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