Multidimensional images and aberrations in STEM

doi:10.1088/1674-1056/ad73b2

Abstract Recent advances in scanning transmission electron microscopy (STEM) have led to increased development of multi-dimensional STEM imaging modalities and novel image reconstruction methods. This interest arises because the main electron lens in a modern transmission electron microscope usually has a diffraction-space information limit that is significantly better than the real-space resolution of the same lens. This state-of-affairs is sometimes shared by other scattering methods in modern physics and contributes to a broader excitement surrounding multidimensional techniques that scan a probe while recording diffraction-space images, such as ptychography and scanning nano-beam diffraction. However, the contrasting resolution in the two spaces raises the question as to what is limiting their effective performance. Here, we examine this paradox by considering the effects of aberrations in both image and diffraction planes, and likewise separate the contributions of pre- and post-sample aberrations. This consideration provides insight into aberration-measurement techniques and might also indicate improvements for super-resolution techniques.

Keywords: scanning transmission electron microscopy (STEM) aberrations

Received: 07 June 2024
Revised: 11 August 2024
Accepted manuscript online: 27 August 2024

PACS:	68.37.Ma	(Scanning transmission electron microscopy (STEM))
	07.78.+s	(Electron, positron, and ion microscopes; electron diffractometers)
	68.37.Og	(High-resolution transmission electron microscopy (HRTEM))
	87.64.Ee	(Electron microscopy)

Fund: This manuscript has been authored by UT-Batelle, LLC, under Contract No. DE-AC05000R22725 with the U.S. Department of Energy.

Corresponding Authors: Eric R. Hoglund, Andrew R. Lupini
E-mail: hoglunder@ornl.gov;arl1000@ornl.gov

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Eric R. Hoglund and Andrew R. Lupini Multidimensional images and aberrations in STEM 2024 Chin. Phys. B 33 096807

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