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Optical response of Al/Ti bilayer transition edge sensors |
| Zhang Qing-Ya (张青雅)a b, Wang Tian-Shun (王天顺)c d, Liu Jian-She (刘建设)a b, Dong Wen-Hui (董文慧)a b, He Gen-Fang (何根芳)a b, Li Tie-Fu (李铁夫)a b, Zhou Xing-Xiang (周幸祥)c d, Chen Wei (陈炜)a b |
a Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, China;
b Institute of Microelectronics, Department of Micro/Nanoelectronics, Tsinghua University, Beijing 100084, China;
c Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China;
d CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China |
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Abstract We report the optical response characteristics of Al/Ti bilayer transition edge sensors (TESs), which are mainly comprised of Al/Ti bilayer thermometers and suspended SiN membranes for thermal isolation. The measurement was performed in a 3He sorption refrigerator and the device's response to optical pulses was investigated using a pulsed laser source. Based on these measurements, we obtained the effective recovery time (τ eff) of the devices at different biases and discussed the dependence of τeff on the bias. The device with a 940 μm × 940 μm continuous suspended SiN membrane demonstrated a fast response speed with τ eff = 3.9 μs, which indicates a high temperature sensitivity (α = T/R ·d R/dT = 326). The results also showed that the TES exhibits good linearity under optical pulses of variable widths.
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Received: 04 March 2014
Revised: 24 April 2014
Accepted manuscript online:
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PACS:
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85.25.Oj
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(Superconducting optical, X-ray, and γ-ray detectors (SIS, NIS, transition edge))
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74.70.-b
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(Superconducting materials other than cuprates)
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| Fund: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00304), Tsinghua University Initiative Scientific Research Program, China (Grant No. 20131089314), and the National Natural Science Foundation of China (Grant Nos. 60836001 and 11273023 ). |
Corresponding Authors:
Zhou Xing-Xiang, Chen Wei
E-mail: xizhou@ustc.edu.cn;weichen@tsinghua.edu.cn
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Cite this article:
Zhang Qing-Ya (张青雅), Wang Tian-Shun (王天顺), Liu Jian-She (刘建设), Dong Wen-Hui (董文慧), He Gen-Fang (何根芳), Li Tie-Fu (李铁夫), Zhou Xing-Xiang (周幸祥), Chen Wei (陈炜) Optical response of Al/Ti bilayer transition edge sensors 2014 Chin. Phys. B 23 118502
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