Chin. Phys. B
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Chin. Phys. B  2014, Vol. 23 Issue (10): 106803    DOI: 10.1088/1674-1056/23/10/106803
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves
Xiao Xia, Tao Ye, Sun Yuan
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China

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