Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

doi:10.1088/1674-1056/26/9/095204

Abstract Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.

Keywords: electron cyclotron resonance (ECR) ion source hydrogen plasma plasma diagnosis optical emission spectroscopy

Received: 24 February 2017
Revised: 19 May 2017
Accepted manuscript online:

PACS:	52.50.Sw	(Plasma heating by microwaves; ECR, LH, collisional heating)
	52.50.Dg	(Plasma sources)
	52.70.-m	(Plasma diagnostic techniques and instrumentation)
	52.70.Kz	(Optical (ultraviolet, visible, infrared) measurements)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 11175009 and 11575013).

Corresponding Authors: Hai-Tao Ren
E-mail: htren@pku.edu.cn

Cite this article:

Wen-Bin Wu(武文斌), Hai-Tao Ren(任海涛), Shi-Xiang Peng(彭士香), Yuan Xu(徐源), Jia-Mei Wen(温佳美), Jiang Sun(孙江), Ai-Lin Zhang(张艾霖), Tao Zhang(张滔), Jing-Feng Zhang(张景丰), Jia-Er Chen(陈佳洱) Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University 2017 Chin. Phys. B 26 095204

[1]	Peng S X, Song Z Z, Yu J X, Ren H T, Zhang M, Yuan Z X, Lu P N, Zhao J, Chen J E, Guo Z Y and Lu Y R 2010 Proceedings of ECRIS10 August 23-26, 2010, Grenoble, France, p. 102
[2]	Song Z Z, Jiang D and Yu J X 1996 Rev. Sci. Instrum. 67 1003
[3]	Peng S X, Zhang M, Song Z Z, Xu R, Zhao J, Yuan Z X, Yu J X, Chen J and Guo Z Y 2008 Rev. Sci. Instrum. 79 02B706
[4]	Ren H T, Peng S X, Zhang M, Zhou Q F, Song Z Z, Xu Y, Lu P N, Xu R, Zhao J, Yu J X, Lu Y R, Guo Z Y and Chen J E 2010 Rev. Sci. Instrum. 81 02B714
[5]	Peng S X, Zhang T, Ren H T, Zhang A L, Xu Y, Zhang J F, Guo Z Y and Chen J E 2016 Rev. Sci. Instrum. 87 02B125
[6]	Gobin R, Benmeziane K, Delferriére O, Ferdinand R, Girard A and Harrault 2005 AIP Conference Proceedings 763 289
[7]	Sakoda T, Momii S, Uchino K, Muraoka K, Bowden M, Maeda M, Manabe Y, Kitagawa M and Kimura T 1991 Jpn. J. Appl. Phys. 30 L1425
[8]	Bowden M D, Okamoto T, Kimura F, Muta H, Uchino K, Muraoka K, Sakoda T, Maeda M, Manabe Y, Kitagawa and Kimura T 1993 J. Appl. Phys. 73 2732
[9]	Schmitt C, Bowers M, Collon P, Robertson D, Henderson D, Jiang C L, Pardo R C, Rehm E, Scott R, Vondrasek R, Calaprice F, Haas E D and Galbiati C 2008 Proceedings of ECRIS08, September 15-18, 2008, Chicago, Illinois, USA, p. 46
[10]	Button D and Hotchkis M A C 2008 Proceedings of ECRIS08, September 15-18, 2008, Chicago, Illinois, USA, p. 53
[11]	Thuillier T 2013 Proceedings of Cyclotrons2013, September 16-20, 2013 Vancouver, BC, Canada, p. 130
[12]	Xu Y, Peng S X, Ren H T, Zhao J, Chen J, Zhang T, Zhang J F, Guo Z Y and Chen J E 2014 Proceedings of ECRIS2014 August 24-28, 2014, Nizhny Novgorod, Russia, p. 20
[13]	Fantz U 2006 Plasma Sources Sci. Technol. 15 S137
[14]	Fantz U, Falter H, Franzen P, Wünderlich D, Berger M, Lorenz A, Kraus W, McNeely P, Riedl R and Speth E 2006 Nuclear. Fusion 46 S297
[15]	Fantz U 2004 Contrib. Plasma Phys. 44 508
[16]	Qayyum A, Zeb S, Naveed M A, Ghauri S A, Zakaullah M and Waheed A 2005 J. Appl. Phys. 98 103303
[17]	Oomori T, Tuda M, Ootera H and Ono K 1991 J. Vac. Sci. Technol. A 9 722
[18]	Xu Y, Peng S X, Ren H T, Zhao J, Chen J, Zhang A L, Zhang T, Guo Z Y and Chen J E 2014 Rev. Sci. Instrum. 85 02A943
[19]	Jones E M 1977 Atomic Collision Processes in Plasma Physics Experiments Ⅱ, Report CLM-R 175 UKAEA
[20]	Suzuki T, Sawado Y, Lida T and Fujii Y 2004 Rev. Sci. Instrum. 75 1520
[21]	Lawrie S R, Faircloth D C and Philippe K 2012 Rev. Sci. Instrum. 83 02A704
[22]	Jin D Z, Yang Z H, Tang P Y, Xiao K X and Dai J Y 2009 Vacuum. 83 451

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Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

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