Novel single-transverse-mode control of VCSELs with dielectric mode filter

doi:10.1088/1674-1056/27/7/074210

Abstract We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers (VCSELs) to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer (SiO₂) is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. Destructive etching techniques (dry/wet) or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.

Keywords: single-mode dielectric mode filter anti-phase reflection mirror reflectivity VCSEL

Received: 24 January 2018
Revised: 03 April 2018
Accepted manuscript online:

PACS:	42.55.Px	(Semiconductor lasers; laser diodes)
	42.62.Fi	(Laser spectroscopy)

Fund: Project supported by the National Key Research and Development Project, China (Grant No. 2017YFB0503200), the National Natural Science Foundation of China (Grant Nos. 61434005, 61474118, 11774343, and 11674314), the Science and Technology Program of Jilin Province, China (Grant No. 20160203013GX), and the Youth Innovation Promotion Association, China (Grant No. 2017260).

Corresponding Authors: Xing Zhang
E-mail: zhangx@ciomp.ac.cn

Cite this article:

Lei Xiang(向磊), Xing Zhang(张星), Jian-Wei Zhang(张建伟), You-Wen Huang(黄佑文), Yong-Qiang Ning(宁永强), Li-Jun Wang(王立军) Novel single-transverse-mode control of VCSELs with dielectric mode filter 2018 Chin. Phys. B 27 074210

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Novel single-transverse-mode control of VCSELs with dielectric mode filter

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