The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology

doi:10.1088/1674-1056/26/8/088401

Abstract

The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology has been investigated deeply. The fabricated 1-nH spiral inductor on SiC substrate demonstrates a self-resonant frequency of 51.6 GHz, with a peak Q-fact of 12.14 at 22.1 GHz. From the S-parameters measurements, the exponential decay phenomenon is observed for L, Q-factor, and SRF with the air-bridge height decreasing, and an analytic expression is concluded to exactly fit the measured data which can be used to predict the performance of the spiral inductor. All the coefficients in the formula have specific meaning. By means of establishing the lumped model, the parasitic coupling capacitance of the air-bridge has been extracted and presents the exponential decay with the air-bridge heights decreasing which indicates that this capacitor is directly related to the coupling effect of the air-bridge. Through the electromagnetic field distribution simulation, the details of the electric field around the air-bridge have been presented which demonstrate the formation and the variation principles of the coupling effect.

Keywords: coupling effect air-bridge broadband spiral inductor exponential decay SiC MMIC

Received: 20 March 2017
Revised: 03 May 2017
Accepted manuscript online:

PACS:	84.32.-y	(Passive circuit components)
	84.32.Hh	(Inductors and coils; wiring)
	84.40.Dc	(Microwave circuits)
	85.30.De	(Semiconductor-device characterization, design, and modeling)

Fund:

Project supported by the National Natural Science Foundation of China (Grant Nos. 61334002 and 61474091) and the National High Technology Research and Development Program of China (Grant No. 2015AA016801).

Corresponding Authors: Xiao-Hua Ma
E-mail: xhma@xidian.edu.cn

About author: 0.1088/1674-1056/26/8/

Cite this article:

Jia-Xin Zheng(郑佳欣), Xiao-Hua Ma(马晓华), Yang Lu(卢阳), Bo-Chao Zhao(赵博超), Heng-Shuang Zhang(张恒爽), Meng Zhang(张濛), Li-Xiang Chen(陈丽香), Qing Zhu(朱青), Yue Hao(郝跃) The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology 2017 Chin. Phys. B 26 088401

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The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology

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