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Chin. Phys. B, 2016, Vol. 25(7): 075202    DOI: 10.1088/1674-1056/25/7/075202
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering

Ming-Wei Gao(高明伟)1, Chao Ye(叶超)1,2, Xiang-Ying Wang(王响英)3, Yi-Song He(何一松)1, Jia-Min Guo(郭佳敏)1, Pei-Fang Yang(杨培芳)1
1 College of Physics, Optoelectronics and Energy, Soochow University, Suzhou 215006, China;
2 Key Laboratory of Thin Films of Jiangsu Province, Soochow University, Suzhou 215006, China;
3 Medical College, Soochow University, Suzhou 215123, China
Abstract  Growth and structural properties of thin a-C films prepared by the 60 MHz very-high-frequency (VHF) magnetron sputtering were investigated. The energy and flux of ions impinging the substrate were also analyzed. It is found that the thin a-C films prepared by the 60 MHz sputtering have a lower growth rate, a smooth surface, and more sp3 contents. These features are related to the higher ion energy and the lower ions flux onto the substrate. Therefore, the 60 MHz VHF sputtering is more suitable for the preparation of thin a-C film with more sp3 contents.
Keywords:  carbon thin films      very-high-frequency sputtering      structural properties  
Received:  25 January 2016      Revised:  07 March 2016      Published:  05 July 2016
PACS:  52.80.Pi (High-frequency and RF discharges)  
  81.15.Cd (Deposition by sputtering)  
  68.55.-a (Thin film structure and morphology)  
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 11275136).
Corresponding Authors:  Chao Ye     E-mail:  cye@suda.edu.cn

Cite this article: 

Ming-Wei Gao(高明伟), Chao Ye(叶超), Xiang-Ying Wang(王响英), Yi-Song He(何一松), Jia-Min Guo(郭佳敏), Pei-Fang Yang(杨培芳) Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering 2016 Chin. Phys. B 25 075202

[1] Wan D and Komvopoulos K 2007 J. Phys. Chem. C 111 9891
[2] Dwivedi N, Yeo R J, Goohpattader P S, Satyanarayana N, Tripathy S and Bhatia C S 2015 Diamond Relat. Mater. 51 14
[3] Lu W, Komvopoulos K and Yeh S W 2001 J. Appl. Phys. 89 2422
[4] Xie J and Komvopoulos K 2015 Surf. Coat. Technol. 262 15
[5] Matlak J and Komvopoulos K 2015 Thin Solid Films 579 167
[6] Coskun Ö D and Zerrin T 2015 Diamond Relat. Mater. 56 29
[7] Sun P, Hu M, Zhang F, Ji Y Q, Liu H S, Liu D D and Leng J 2015 Chin. Phys. B 24 067803
[8] Catena A, McJunkin T, Agnello S, Gelardi F M, Wehner S and Fischer C B 2015 Appl. Surf. Sci. 347 657
[9] Wang Y J, Li H X, Ji L, Liu X H, Wu Y X, Zhou H D and Chen J M 2012 Chin. Phys. B 21 016101
[10] Jiang J L, Wang Y B, Wang Q, Huang H, Wei Z Q and Hao J Y 2016 Chin. Phys. B 25 048101
[11] Wang J, Liu G C, Wang L D, Deng X L and Xu J 2008 Chin. Phys. B 17 3108
[12] Huang F P, Ye C, He H J, Liu Y, Wang X Y and Ning Z Y 2014 Plasma Sources Sci. Technol. 23 015003
[13] Ye C, He H J, Huang F P, Liu Y and Wang X Y 2014 Phys. Plasma 21 043509
[14] He H J, Ye C, Wang X Y, Huang F P and Liu Y 2014 ECS J. Solid State Sci. Technol. 3 Q74
[15] He Y S, Ye C, Wang X Y, Gao M W, Guo J M and Yang P F 2016 Appl. Surf. Sci. 363 477
[16] Dai H Y, Cheng X R, Wang C F, Xue Y C and Chen Z P 2015 Optik 126 861
[17] Tolstoy V P, Chernyshova I V and Skryshevsky V A 2003 Handbook of Infrared Spectroscopy of Ultrathin Films (Hoboken: John Wiley & Sons, Inc.)
[18] Wan D and Komvopoulos K 2006 J. Appl. Phys. 100 063307
[19] Wan D and Komvopoulos K 2006 Appl. Phys. Lett. 88 221908
[20] Ostrikova K, Neytsb E C and Meyyappanc M 2013 Adv. Phys. 62 113
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