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Chin. Phys. B, 2016, Vol. 25(1): 017401    DOI: 10.1088/1674-1056/25/1/017401
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Fabrication of superconducting NbN meander nanowires by nano-imprint lithography

Mei Yang(杨美)1,2, Li-Hua Liu(刘丽华)1, Lu-Hui Ning(宁鲁慧)2, Yi-Rong Jin(金贻荣)2, Hui Deng(邓辉)2, Jie Li(李洁)2, Yang Li(李阳)1, Dong-Ning Zheng(郑东宁)2
1. Department of Physics, School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China;
2. Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Abstract  

Superconducting nanowire single photon detector (SNSPD), as a new type of superconducting single photon detector (SPD), has a broad application prospect in quantum communication and other fields. In order to prepare SNSPD with high performance, it is necessary to fabricate a large area of uniform meander nanowires, which is the core of the SNSPD. In this paper, we demonstrate a process of patterning ultra-thin NbN films into meander-type nanowires by using the nano-imprint technology. In this process, a combination of hot embossing nano-imprint lithography (HE-NIL) and ultraviolet nano-imprint lithography (UV-NIL) is used to transfer the meander nanowire structure from the NIL Si hard mold to the NbN film. We have successfully obtained a NbN nanowire device with uniform line width. The critical temperature (Tc) of the superconducting NbN meander nanowires is about 5 K and the critical current (Ic) is about 3.5 μA at 2.5 K.

Keywords:  nano-imprint lithography      meander nanowires      ultra-thin NbN films  
Received:  09 September 2015      Revised:  14 October 2015      Accepted manuscript online: 
PACS:  74.78.-w (Superconducting films and low-dimensional structures)  
  74.25.F- (Transport properties)  
  81.16.Rf (Micro- and nanoscale pattern formation)  
  81.07.Gf (Nanowires)  
Fund: 

Project supported by the National Basic Research Program of China (Grant Nos. 2011CBA00106 and 2009CB929102) and the National Natural Science Foundation of China (Grant Nos. 11104333 and 10974243).

Corresponding Authors:  Dong-Ning Zheng     E-mail:  dzheng@iphy.ac.cn

Cite this article: 

Mei Yang(杨美), Li-Hua Liu(刘丽华), Lu-Hui Ning(宁鲁慧), Yi-Rong Jin(金贻荣), Hui Deng(邓辉), Jie Li(李洁), Yang Li(李阳), Dong-Ning Zheng(郑东宁) Fabrication of superconducting NbN meander nanowires by nano-imprint lithography 2016 Chin. Phys. B 25 017401

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