Post-annealing effect on the structural and mechanical properties of multiphase zirconia films deposited by a plasma focus device

doi:10.1088/1674-1056/22/12/127306

Abstract Nanostructured multiphase zirconia films (MZFs) are deposited on Zr substrate by the irradiation of energetic oxygen ions emanated from a plasma focus device. The oxygen operating gas pressure of 1 mbar (1 bar=10⁵ Pa) provides the most appropriate ion energy flux to deposit crystalline ZrO₂ films. X-ray diffraction (XRD) patterns reveal the formation of polycrystalline ZrO₂ films. The crystallite size (CS), crystal growth, and dislocation densities are attributed to increasing focus shots, sample axial distances, and working gas pressures. Phase and orientation transformations from t-ZrO₂ to m-ZrO₂ and c-ZrO₂ are associated with increasing focus shots and continuous annealing. For lower (200 ℃) annealing temperature (AT), full width at half maximum (FWHM) of diffraction peak, CS, and dislocation density (δ) for (020) plane are found to be 0.494, 16.6 nm, and 3.63×10^-3 nm^-2 while for higher (400 ℃) AT, these parameters for (111) plane are found to be 0.388, 20.87 nm, and 2.29×10^-3 nm^-2, respectively. Scanning electron microscope (SEM) results demonstrate the formation of rounded grains with uniform distribution. The estimated values of atomic ratio (O/Zr) in ZrO₂ films deposited for different axial distances (6 cm, 9 cm, and 12 cm) are found to be 2.1, 2.2, and 2.3, respectively. Fourier transform infrared (FTIR) analysis reveals that the bands appearing at 441 cm^-1 and 480 cm^-1 belong to m-ZrO₂ and t-ZrO₂ phases, respectively. Maximum microhardness (8.65±0.45 GPa) of ZrO₂ film is ～ 6.7 times higher than the microhardness of virgin Zr.

Keywords: zrconia phase transformation XRD SEM Fourier transform infrared analysis

Received: 27 March 2013
Revised: 14 May 2013
Accepted manuscript online:

PACS:	73.50.Lw	(Thermoelectric effects)
	68.60.Bs	(Mechanical and acoustical properties)
	68.55.J-	(Morphology of films)
	61.72.-y	(Defects and impurities in crystals; microstructure)

Fund: Project supported by the Higher Education Commission of Pakistan.

Corresponding Authors: I. A. Khan
E-mail: ejaz_phd@yahoo.com

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I. A. Khan, R. S. Rawat, R. Ahmad, M. A. K. Shahid Post-annealing effect on the structural and mechanical properties of multiphase zirconia films deposited by a plasma focus device 2013 Chin. Phys. B 22 127306

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Post-annealing effect on the structural and mechanical properties of multiphase zirconia films deposited by a plasma focus device

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