Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

doi:10.1088/1674-1056/21/1/016501

Abstract The local thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics is measured and imaged by using a scanning thermal microscope (SThM) and complementary scanning electron microscope (SEM) based techniques at room temperature. The quantitative thermal conductivity for the AlN sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3ω method. A thermal conductivity of 308 W/m·K within grains corresponding to that of high-purity single crystal AlN is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.

Keywords: thermal conductivity AlN ceramics scanning thermal microscopy scanning electron microscopy

Received: 11 March 2011
Revised: 26 July 2011
Accepted manuscript online:

PACS:	65.40.-b	(Thermal properties of crystalline solids)
	66.70.Df	(Metals, alloys, and semiconductors)

Fund: Project supported by the National Basic Research Program of China (Grant No. 2009CB623702), the National Natural Science Foundation of China (Grant No. 10904001), and the Key Project Funding Scheme of Beijing Municipal Education Committee, China (Grant No

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Zhang Yue-Fei(张跃飞), Wang Li(王丽), R. Heiderhoff, A. K. Geinzer, Wei Bin(卫斌), Ji Yuan(吉元), Han Xiao-Dong(韩晓东), L.J. Balk, and Zhang Ze(张泽) Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques 2012 Chin. Phys. B 21 016501

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Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques

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