Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques
Zhang Yue-Fei(张跃飞)a), Wang Li(王丽)a), R. Heiderhoffb), A.~K. Geinzerb), Wei Bin(卫斌)a), Ji Yuan(吉元)a), Han Xiao-Dong(韩晓东)a)†, L.~J. Balkb), and Zhang Ze(张泽)a)c)
aInstitute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China; bDepartment of Electronics, Faculty of Electrical, Information and Media Engineering, University of Wuppertal, Wuppertal D-42119, Germany; c Department of Materials Science, Zhejiang University, Hangzhou 300038, China
Abstract The local thermal conductivity of polycrystalline aluminum nitride (AlN) ceramics is measured and imaged by using a scanning thermal microscope (SThM) and complementary scanning electron microscope (SEM) based techniques at room temperature. The quantitative thermal conductivity for the AlN sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3ω method. A thermal conductivity of 308 W/m·K within grains corresponding to that of high-purity single crystal AlN is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.
Fund: Project supported by the National Basic Research Program of China (Grant No. 2009CB623702), the National Natural Science Foundation of China (Grant No. 10904001), and the Key Project Funding Scheme of Beijing Municipal Education Committee, China (Grant No
Cite this article:
Zhang Yue-Fei(张跃飞), Wang Li(王丽), R. Heiderhoff, A. K. Geinzer, Wei Bin(卫斌), Ji Yuan(吉元), Han Xiao-Dong(韩晓东), L.J. Balk, and Zhang Ze(张泽) Local thermal conductivity of polycrystalline AlN ceramics measured by scanning thermal microscopy and complementary scanning electron microscopy techniques 2012 Chin. Phys. B 21 016501
[1]
AlShaikhi A and Srivastava G P 2008 J. Appl. Phys. 103 083554
[2]
Slack G A, Tanzilli R A, Pohl R O and Vandersande J W 1987 J. Phys. Chem. Solids 48 641
[3]
Medraj M, Baik Y, Thompson W T and Drew R A L 2005 J. Mater. Proc. Technol. 161 415
[4]
Franco J A and Shanafield D J 2004 Ceramica 50 247
[5]
AlShaikhi A and Srivastava G P 2009 J. Phys.: Condens. Matter 21 174207
[6]
Wang Z L, Tang D W, Jia T and Mao A M 2007 Acta Phys. Sin. 56 747 (in Chinese)
[7]
Fenwick O, Bozec L, Credgington D, Hammiche A, Lazzerini G M, Silberberg Y R and Cacialli F 2009 Nat. Nanotechnol. 4 664
[8]
Zhang Y F, Wang L, Ji Y, Han X D, Zhang Z, Heiderhoff R, Tiedemann A K and Balk L J 2009 IEEE Proceedings of 16th IPFA CFP09777-CDR 520
[9]
Tiedemann A K, Heiderhoff R, Balk L J and Phang J C H 2009 IEEE Proceedings of 16th IPFA CFP09RPS-CDR 327
[10]
Feng P and Wang T H 2003 Acta Phys. Sin. 52 2249 (in Chinese)
[11]
Joachimsthaler I, Heiderhoff R and Balk L J 2003 Meas. Sci. Tech. 14 87
[12]
Fiege G B M, Altes A, Heiderhoff R and Balk L J 1999 J. Phys. D: Appl. Phys. 32 13
[13]
Altes A, Heiderhoff R and Balk L J 2004 J. Phys. D: Appl. Phys. 37 952
[14]
Cahill D G 1990 Rev. Sci. Instrum. 61 802
[15]
Watari K, Nakano H, Urabe K, Ishizaki K, Cao S and Mori K 2002 J. Mater. Res. 17 2940
[16]
Lee S K, Yamda I, Kume S, Nakano H, Hatori K, Matsui G and Watari K 2008 J. Ceram. Soc. Jap. 116 1260
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