THE EFFECT OF MESH ANODE ON CATHODIC ARC IN FOCUSING MAGNETIC FIELD
Tang Bao-yina, T. K. Kwoka, Zeng Zhao-minga, Paul K. Chua, Zhang Taob, Hou Jun-dac, I. G. Brownd
a Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong; b Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong; Institute of low energy Nuclear Physics, Beijing Normal University 100875, China; c Institute of low energy Nuclear Physics, Beijing Normal University 100875, China; d Lawrence Berkeley National Laboratory, University of California, Berkeley, CA 94720
Abstract The performance and characteristics of a cathodic arc deposition apparatus consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode are investigated. The arc voltage Va is measured with a fixed arc current. The relationship between Va and the magnetic field B with and without a mesh is obtained. In addition, the relationship between the arc current Ia and Vc, the voltage to which the artificial transmission line was charged, is measured with and without the mesh to determine the minimum ignition voltage for the arc. The arc resistance increases with the focusing magnetic strength B and decreases when using the mesh. Our results indicate that the high transparency and large area of the mesh allows a high plasma flux to penetrate the anode from the cathodic arc. The mesh also stabilizes the cathodic arc and gives better performance when used in concert with a focusing magnetic field.