Abstract The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, Vθ). Using a hybrid model, we treat ions as particles and electrons as fluid. The motion of ions and electrons is determined by external magnetic field and self- consistent electrostatic field. For a given magnetic distribution, the spatial profiles of electron temperature, plasma potential, plasma density and ionization rate have been obtained. The influences of microwave power, neutral gas pressure and magnetic field on plasma parameters have been studied. The comparisons between simulation and experimental results are made and the explanations for some physical phenomena are given.
Received: 26 June 1995
Published: 20 September 1996