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Acta Phys. Sin. (Overseas Edition), 1996, Vol. 5(9): 677-691    DOI: 10.1088/1004-423X/5/9/006
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Prev   Next  

NUMERICAL SIMULATION OF ECR PLASMA SOURCES

WU HAN-MINa, SHAO FU-QIUb, WANG LONGb, YAO XIN-ZIb
a Institute of Mechanics, Academia Sinica, Beijing 100080, China; b Institute of Physics, Academia Sinica, Beijing 100080, China
Abstract  The available electron cyclotron resonance plasma source has been simulated in two-dimensional configuration space (z, r) and three-dimensional velocity space (Vz, Vr, Vθ). Using a hybrid model, we treat ions as particles and electrons as fluid. The motion of ions and electrons is determined by external magnetic field and self- consistent electrostatic field. For a given magnetic distribution, the spatial profiles of electron temperature, plasma potential, plasma density and ionization rate have been obtained. The influences of microwave power, neutral gas pressure and magnetic field on plasma parameters have been studied. The comparisons between simulation and experimental results are made and the explanations for some physical phenomena are given.
Received:  26 June 1995      Published:  20 September 1996
PACS:  52.50.Dg (Plasma sources)  
  52.65.Ww (Hybrid methods)  
  52.25.Jm (Ionization of plasmas)  
  52.20.Fs (Electron collisions)  
  52.20.Hv (Atomic, molecular, ion, and heavy-particle collisions)  
  52.40.Kh (Plasma sheaths)  
Fund: Project supported by the National Natural Science Foundation of China.

Cite this article: 

WU HAN-MIN, SHAO FU-QIU, WANG LONG, YAO XIN-ZI NUMERICAL SIMULATION OF ECR PLASMA SOURCES 1996 Acta Phys. Sin. (Overseas Edition) 5 677

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