Physical analysis of normally-off ALD Al2O3/GaN MOSFET with different substrates using self-terminating thermal oxidation-assisted wet etching technique
Abstract Based on the self-terminating thermal oxidation-assisted wet etching technique, two kinds of enhancement mode AlO/GaN MOSFETs (metal-oxide-semiconductor field-effect transistors) separately with sapphire substrate and Si substrate are prepared. It is found that the performance of sapphire substrate device is better than that of silicon substrate. Comparing these two devices, the maximum drain current of sapphire substrate device (401 mA/mm) is 1.76 times that of silicon substrate device (228 mA/mm), and the field-effect mobility () of sapphire substrate device (176 cm/Vs) is 1.83 times that of silicon substrate device (96 cm/Vs). The conductive resistance of silicon substrate device is 21.2 mm, while that of sapphire substrate device is only 15.2 mm, which is 61% that of silicon substrate device. The significant difference in performance between sapphire substrate and Si substrate is related to the differences in interface and border trap near AlO/GaN interface. Experimental studies show that (i) interface/border trap density in the sapphire substrate device is one order of magnitude lower than in the Si substrate device, (ii) Both the border traps in AlO dielectric near AlO/GaN and the interface traps in AlO/GaN interface have a significantly effect on device channel mobility, and (iii) the properties of gallium nitride materials on different substrates are different due to wet etching. The research results in this work provide a reference for further optimizing the performances of silicon substrate devices.
Fund: Project supported by the Research on Key Techniques in Reliability of Low Power Sensor Chip for IOTIPS and the Technology Project of Headquarters, State Grid Corporation of China(Grant No. 5700-202041397A-0-0-00).
Corresponding Authors:
Jin-Yan Wang, Yan-Dong He
E-mail: wangjinyan@pku.edu.cn;heyd@pku.edu.cn
Cite this article:
Cheng-Yu Huang(黄成玉), Jin-Yan Wang(王金延), Bin Zhang(张斌), Zhen Fu(付振), Fang Liu(刘芳), Mao-Jun Wang(王茂俊), Meng-Jun Li(李梦军), Xin Wang(王鑫), Chen Wang(汪晨), Jia-Yin He(何佳音), and Yan-Dong He(何燕冬) Physical analysis of normally-off ALD Al2O3/GaN MOSFET with different substrates using self-terminating thermal oxidation-assisted wet etching technique 2022 Chin. Phys. B 31 097401
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