|
|
Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis |
Tian-Long Li(李天龙)1, Zheng Wei(魏征)2, and Wei-Shi Wan(万唯实)1,† |
1 School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China; 2 College of Materials Science and Engineering, Chongqing University, Chongqing 401331, China |
|
|
Abstract A novel instrument that integrates reflection high energy electron diffraction (RHEED), electron energy loss spectroscopy (EELS), and imaging is designed and simulated. Since it can correlate the structural, elemental, and spatial information of the same surface region via the simultaneously acquired patterns of RHEED, EELS, and energy-filtered electron microscopy, it is named correlative reflection electron microscopy (c-REM). Our simulation demonstrates that the spatial resolution of this c-REM is lower than 50 nm, which meets the requirements for in-situ monitoring the structural and chemical evolution of surface in advanced material.
|
Received: 25 March 2021
Revised: 01 May 2021
Accepted manuscript online: 26 May 2021
|
PACS:
|
07.77.Ka
|
(Charged-particle beam sources and detectors)
|
|
07.78.+s
|
(Electron, positron, and ion microscopes; electron diffractometers)
|
|
79.20.Uv
|
(Electron energy loss spectroscopy)
|
|
Fund: Project supported by the Shanghai Tech University and the National Natural Science Foundation of China (Grant No. 11774039). |
Corresponding Authors:
Wei-Shi Wan
E-mail: wanwsh@shanghaitech.edu.cn
|
Cite this article:
Tian-Long Li(李天龙), Zheng Wei(魏征), and Wei-Shi Wan(万唯实) Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis 2021 Chin. Phys. B 30 120702
|
[1] Ingle N J C 2011 Inelastic scattering techniques for in situ characterization of thin film growth:backscatter Kikuchi diffraction. In Situ Characterization of Thin Film Growth (Woodhead Publishing) pp. 29-51 [2] Ingle N J C, Yuskauskas A, Wicks R, Paul M and Leung S 2010 J. Phys. D:Appl. Phys. 43 133001 [3] Baba-Kishi K Z 1990 Ultramicroscopy 34 205 [4] Müller B and Henzler M 1995 Rev. Sci. Instrum. 66 5232 [5] Hasegawa S, Ino S, Yamamoto Y and Daimon H 1985 Jpn. J. Appl. Phys. 24 L387 [6] Ahn C C, Yoshino H, Tambo T, Wong S S, He G, Taylor M E and Atwater H A 1997 Appl. Phys. Lett. 71 2653 [7] Berz M 2002 COSY INFINITY Version 8.1 Users Guide and Reference Manual (MSUHEP-20704) (Department of Physics and Astronomy, Michigan State University) [8] Berz M 1989 Part. Accel. 24 109 [9] Schmid P, Feng J, Padmore H, Robin D, Rose H, Schlueter R and Wan W 2005 Rev. Sci. Instrum. 76 023302 [10] Herzog R 1935 Z. Phys. 97 596 [11] Hawkes P W (eds) 1982 Magnetic Electron Lenses (Springer-Verlag) [12] Borse G J 1996 Numerical methods with MATLAB:A resource for scientists and engineers (International Thomson Publishing) |
No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|