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Chin. Phys. B, 2021, Vol. 30(12): 120702    DOI: 10.1088/1674-1056/ac0522
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Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis

Tian-Long Li(李天龙)1, Zheng Wei(魏征)2, and Wei-Shi Wan(万唯实)1,†
1 School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China;
2 College of Materials Science and Engineering, Chongqing University, Chongqing 401331, China
Abstract  A novel instrument that integrates reflection high energy electron diffraction (RHEED), electron energy loss spectroscopy (EELS), and imaging is designed and simulated. Since it can correlate the structural, elemental, and spatial information of the same surface region via the simultaneously acquired patterns of RHEED, EELS, and energy-filtered electron microscopy, it is named correlative reflection electron microscopy (c-REM). Our simulation demonstrates that the spatial resolution of this c-REM is lower than 50 nm, which meets the requirements for in-situ monitoring the structural and chemical evolution of surface in advanced material.
Keywords:  reflection high energy electron diffraction (RHEED)      electron energy loss spectroscopy (EELS)      parallel detection      energy-filtered electron microscopy  
Received:  25 March 2021      Revised:  01 May 2021      Accepted manuscript online:  26 May 2021
PACS:  07.77.Ka (Charged-particle beam sources and detectors)  
  07.78.+s (Electron, positron, and ion microscopes; electron diffractometers)  
  79.20.Uv (Electron energy loss spectroscopy)  
Fund: Project supported by the Shanghai Tech University and the National Natural Science Foundation of China (Grant No. 11774039).
Corresponding Authors:  Wei-Shi Wan     E-mail:

Cite this article: 

Tian-Long Li(李天龙), Zheng Wei(魏征), and Wei-Shi Wan(万唯实) Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis 2021 Chin. Phys. B 30 120702

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