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Influence of nitrogen flow rate on the structure and properties of Ti and N co-doped diamond like carbon films deposited by arc ion plating |
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Abstract In this paper, Ti-C-N nanocomposite films were deposited under different nitrogen flow rate by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gases. The surface morphology, composition, microstructure and mechanical properties of the Ti-C-N films were investigated systematically by field emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS), grazing incident X-ray diffraction (GIXRD), Raman spectra and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra proves the presence of diamond-like carbon, indicating the formation of nanocomposite films with microstructures comprising of nanocrystalline Ti(C,N) phase embedded into an diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure and properties of the films. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively.
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Received: 26 July 2013
Revised: 22 September 2013
Published: 31 October 2013
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Corresponding Authors:
Lin Zhang
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Cite this article:
Influence of nitrogen flow rate on the structure and properties of Ti and N co-doped diamond like carbon films deposited by arc ion plating Chin. Phys. B 0
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