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Chin. Phys. B, 2013, Vol. 22(6): 060309    DOI: 10.1088/1674-1056/22/6/060309
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Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

Wu Yu-Lin (吴玉林), Deng Hui (邓辉), Yu Hai-Feng (于海峰), Xue Guang-Ming (薛光明), Tian Ye (田野), Li Jie (李洁), Chen Ying-Fei (陈莺飞), Zhao Shi-Ping (赵士平), Zheng Dong-Ning (郑东宁)
Beijing National Laboratory for Condensed Matter Physics, Institute of Physics,Chinese Academy of Sciences, Beijing 100190, China
Abstract  Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks, Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density (jc) and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubit and charge-flux qubit.
Keywords:  Josephson junction      Al/AlOx/Al      superconducting qubit  
Received:  31 January 2013      Revised:  27 February 2013      Accepted manuscript online: 
PACS:  03.67.Lx (Quantum computation architectures and implementations)  
  85.25.Cp (Josephson devices)  
  85.25.Dq (Superconducting quantum interference devices (SQUIDs))  
Fund: Project supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102), the National Natural Science Foundation of China (Grant Nos. 11104333, 10974243, and 11161130519), and the Knowledge Innovation Program of the Chinese Academy of Sciences.
Corresponding Authors:  Zheng Dong-Ning     E-mail:  dzheng@aphy.iphy.ac.cn

Cite this article: 

Wu Yu-Lin (吴玉林), Deng Hui (邓辉), Yu Hai-Feng (于海峰), Xue Guang-Ming (薛光明), Tian Ye (田野), Li Jie (李洁), Chen Ying-Fei (陈莺飞), Zhao Shi-Ping (赵士平), Zheng Dong-Ning (郑东宁) Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process 2013 Chin. Phys. B 22 060309

[1] Josephson B D 1962 Phys. Lett. 1 251
[2] Korotkov A N 2009 Quantum Inf. Process. 8 51
[3] Giazotto F, Heikkilä T T, Luukanen A, Savin A M and Pekola J P 2006 Rev. Mod. Phys. 78 217
[4] Taylor B N, Parker W H and Langenberg D N 1969 Rev. Mod. Phys. 41 375
[5] Yu H F, Cao W H, Zhu X B, Yang H F, Yu H W, Ren Y F, Gu C Z, Chen G H and Zhao S P 2008 Chin. Phys. B 17 3083
[6] Dolan G J 1977 Appl. Phys. Lett. 31 337
[7] Plantenberg J H, Groot P C, Harmans C J P M and Mooij J E 2007 Nature 447 836
[8] Tian Y, Yu H F, Deng H, Xue G M, Liu D T, Ren Y F, Chen G H, Zheng D N, Jing X N, Lu L, Zhao S P and Han S 2012 Rev. Sci. Instrum. 83 033907
[9] Mooij J E, Orlando T P, Levitov L S, Tian L, van der Wal C H and Lloyd S 1999 Science 285 1036
[10] Orlando T P, Mooij J E, Tian L, van der Wal C H, Levitov L S, Lloyd S and Mazo J J 1999 Phys. Rev. B 60 15398
[11] Vion D, Aassime A, Cottet A, Joyez P, Pothier H, Urbina C, Esteve D and Devoret M H 2002 Science 296 886
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