Please wait a minute...
Chin. Phys. B, 2021, Vol. 30(6): 068503    DOI: 10.1088/1674-1056/abeee6
Special Issue: SPECIAL TOPIC — Quantum computation and quantum simulation
SPECIAL TOPIC—Quantum computation and quantum simulation Prev   Next  

Fabrication and characterization of all-Nb lumped-element Josephson parametric amplifiers

Hang Xue(薛航)1,2,3, Zhirong Lin(林志荣)1,2,3,†, Wenbing Jiang(江文兵)1,3, Zhengqi Niu(牛铮琦)1,2,3,4, Kuang Liu(刘匡)1,2,3, Wei Peng(彭炜)1,2,3, and Zhen Wang(王镇)1,2,3,4
1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology(SIMIT), Chinese Academy of Sciences, Shanghai 200050, China;
2 University of Chinese Academy of Sciences, Beijing 100049, China;
3 CAS Center for Excellence in Superconducting Electronics(CENSE), Shanghai 200050, China;
4 ShanghaiTech University, Shanghai 201210, China
Abstract  Josephson parametric amplifiers (JPAs) with nearly quantum-limited noise performance have become indispensable devices for the measurements of superconducting quantum information. We have developed an all-Nb lumped-element flux-driven JPA operating in the three-wave mixing mode. Our Nb-based JPA comprises Nb/Al-AlOx/Nb Josephson junctions, a parallel-plate capacitor with SiO2 dielectric sandwiched between two Nb layers, a bottom coplanar waveguides layer, and a top Nb wiring layer. We experimentally demonstrate a 20 dB gain over a 190 MHz bandwidth, a mean 1 dB compression of -123 dBm, and near quantum-limited noise performance. This fabrication process can be further used to design impedance transformed parametric amplifiers for multiple-qubit readout.
Keywords:  Josephson parametric amplifier      Nb/Al-AlOx/Nb Josephson junctions      lumped-element resonator  
Received:  13 January 2021      Revised:  25 February 2021      Accepted manuscript online:  16 March 2021
PACS:  85.25.Cp (Josephson devices)  
  85.25.Am (Superconducting device characterization, design, and modeling)  
  85.25.Dq (Superconducting quantum interference devices (SQUIDs))  
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 92065116), Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No. XDA18000000), and the Key-Area Research and Development Program of Guangdong Province, China (Grant No. 2020B0303030002).
Corresponding Authors:  Zhirong Lin     E-mail:

Cite this article: 

Hang Xue(薛航), Zhirong Lin(林志荣), Wenbing Jiang(江文兵), Zhengqi Niu(牛铮琦), Kuang Liu(刘匡), Wei Peng(彭炜), and Zhen Wang(王镇) Fabrication and characterization of all-Nb lumped-element Josephson parametric amplifiers 2021 Chin. Phys. B 30 068503

[1] Caves C M 1982 Phys. Rev. D 26 1817
[2] Siddiqi I, Vijay R, Pierre F, Wilson C M, Metcalfe M, Rigetti C, Frunzio L and Devoret M H 2004 Phys. Rev. Lett. 93 207002
[3] Reed M D, DiCarlo L, Johnson B R, Sun L, Schuster D I, Frunzio L and Schoelkopf R J 2010 Phys. Rev. Lett. 105 173601
[4] Mutus J Y, White T C, Jeffrey E, Sank D, Barends R, Bochmann J, Chen Y, Chen Z, Chiaro B, Dunsworth A, Kelly J, Megrant A, Neill C, O'Malley P J J, Roushan P, Vainsencher A, Wenner J, Siddiqi I, Vijay R, Cleland A N and Martinis J M 2013 Appl. Phys. Lett. 103 122602
[5] Castellanos-Beltran M A, Irwin K D, Hilton G C, Vale L R and Lehnert K W 2008 Nat. Phys. 4 929
[6] Weber S J, Chantasri A, Dressel J, Jordan A N, Murch K W and Siddiqi I 2014 Nature 511 570
[7] Vijay R, Macklin C, Slichter D H, Weber S J, Murch K W, Naik R, Korotkov A N and Siddiqi I 2012 Nature 490 77
[8] Murch K W, Weber S J, Macklin C and Siddiqi I 2013 Nature 502 211
[9] Lin Z R, Inomata K, Oliver W D, Koshino K, Nakamura Y, Tsai J S and Yamamoto T 2013 Appl. Phys. Lett. 103 132602
[10] Vijay R, Slichter D H and Siddiqi I 2011 Phys. Rev. Lett. 106 110502
[11] Abdo B, Sliwa K, Shankar S, Hatridge M, Frunzio L, Schoelkopf R and Devoret M 2014 Phys. Rev. Lett. 112 167701
[12] Yurke B, Corruccini L R, Kaminsky P G, Rupp L W, Smith A D, Silver A H, Simon R W and Whittaker E A 1989 Phys. Rev. A 39 2519
[13] Yamamoto T, Inomata K, Watanabe M, Matsuba K, Miyazaki T, Oliver W D, Nakamura Y and Tsai J S 2008 Appl. Phys. Lett. 93 042510
[14] Zhong L, Menzel E P, Di Candia R, Eder P, Ihmig M, Baust A, Haeberlein M, Hoffmann E, Inomata K, Yamamoto T, Nakamura Y, Solano E, Deppe F, Marx A and Gross R 2013 New J. Phys. 15 125013
[15] Zhou X, Schmitt V, Bertet P, Vion D, Wustmann W, Shumeiko V and Esteve D 2014 Phys. Rev. B 89 214517
[16] White T C, Mutus J Y, Hoi I C, Barends R, Campbell B, Chen Y, Chen Z, Chiaro B, Dunsworth A, Jeffrey E, Kelly J, Megrant A, Neill C, O'Malley P J J, Roushan P, Sank D, Vainsencher A, Wenner J, Chaudhuri S, Gao J and Martinis J M 2015 Appl. Phys. Lett. 106 242601
[17] Macklin C, O'Brien K, Hover D, Schwartz M E, Bolkhovsky V, Zhang X, Oliver W D and Siddiqi I 2015 Science 350 307
[18] Zorin A B 2016 Phys. Rev. Appl. 6 034006
[19] Mutus J Y, White T C, Barends R, Chen Y, Chen Z, Chiaro B, Dunsworth A, Jeffrey E, Kelly J, Megrant A, Neill C, O'Malley P J J, Roushan P, Sank D, Vainsencher A, Wenner J, Sundqvist K M, Cleland A N and Martinis J M 2014 Appl. Phys. Lett. 104 263513
[20] Roy T, Kundu S, Chand M, Vadiraj A M, Ranadive A, Nehra N, Patankar M P, Aumentado J, Clerk A A and Vijay R 2015 Appl. Phys. Lett. 107 262601
[21] Yang R and Deng H 2020 IEEE Trans. Appl. Supercond. 30 1
[22] Wu Y L, Deng H, Yu H F, Xue G M, Tian Y, Li J, Chen Y F, Zhao S P and Zheng D N 2013 Chin. Phys. B 22 060309
[23] Huang K, Guo Q, Song C, Zheng Y, Deng H, Wu Y, Jin Y, Zhu X and Zheng D 2017 Chin. Phys. B 26 094203
[24] Gurvitch M, Washington M A and Huggins H A 1983 Appl. Phys. Lett. 42 472
[25] Tolpygo S K and Amparo D 2010 Supercond. Sci. Technol. 23 034024
[26] Zhang X, Zhang G, Ying L, Xiong W, Han H, Wang Y, Rong L, Xie X and Wang Z 2018 Physica C 548 1
[27] Kempf S, Ferring A, Fleischmann A, Gastaldo L and Enss C 2013 Supercond. Sci. Technol. 26 065012
[28] Tolpygo S K, Bolkhovsky V, Weir T J, Johnson L M, Gouker M A and Oliver W D 2015 IEEE Trans. Appl. Supercond. 25 1
[29] Hatridge M, Vijay R, Slichter D H, Clarke J and Siddiqi I 2011 Phys. Rev. B 83 134501
[30] Clerk A A, Devoret M H, Girvin S M, Marquardt F and Schoelkopf R J 2010 Rev. Mod. Phys. 82 1155
[1] Vacuum-gap-based lumped element Josephson parametric amplifier
Sishi Wu(吴思诗), Dengke Zhang(张登科), Rui Wang(王锐), Yulong Liu(刘玉龙), Shuai-Peng Wang(王帅鹏), Qichun Liu(刘其春), J S Tsai(蔡兆申), and Tiefu Li(李铁夫). Chin. Phys. B, 2022, 31(1): 010306.
[2] Nb-based Josephson parametric amplifier for superconducting qubit measurement
Fei-Fan Su(宿非凡), Zi-Ting Wang(王子婷), Hui-Kai Xu(徐晖凯), Shou-Kuan Zhao(赵寿宽), Hai-Sheng Yan(严海生), Zhao-Hua Yang(杨钊华), Ye Tian(田野), Shi-Ping Zhao(赵士平). Chin. Phys. B, 2019, 28(11): 110303.
No Suggested Reading articles found!