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Chin. Phys. B, 2013, Vol. 22(4): 040701    DOI: 10.1088/1674-1056/22/4/040701
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Nb5N6 microbolometer array for terahertz detection

Tu Xue-Cou (涂学凑), Kang Lin (康琳), Liu Xin-Hua (刘新华), Mao Qing-Kai (毛庆凯), Wan Chao (万超), Chen Jian (陈健), Jin Biao-Bing (金飚兵), Ji Zheng-Ming (吉争鸣), Xu Wei-Wei (许伟伟), Wu Pei-Heng (吴培亨)
School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
Abstract  A novel room-temperature microbolometer array chip consisting of an Nb5N6 thin film microbridge and a dipole planar antenna, which is used as a terahertz (THz) detector is described in this paper. Due to the high temperature coefficient of the resistance, which is as high as -0.7% K-1, of the Nb5N6 thin film, such an antenna-coupled microbolometer is ideal for detecting signals in a frequency range from 0.22 THz to 0.33 THz. The dc responsivity, calculated from the measured I-V curve of the Nb5N6 microbolometer, is about -760 V/W at a bias current of 0.19 mA. A typical noise voltage as low as 10 nV/Hz1/2 yields a low noise equivalent power (NEP) of 1.3×10-11 W/Hz1/2 at a modulation frequency above 4 kHz, and the best RF responsivity, characterized using infrared device measuring method, is about 580 V/W, with the corresponding NEP being 1.7× 10-11 W/Hz1/2. In order to further test the performance of Nb5N6 microbolometer, we construct a quasi-optical type receiver by attaching it to the hyperhemispherical silicon lens, and the result is that the best responsivity of the receiver is up to 320 V/W. This work could offer another way to develop a large scale focal plane array in silicon with simple technique and low cost.
Keywords:  Nb5N6      microbolometer      responsivity      noise equivalent power  
Received:  09 August 2012      Revised:  28 September 2012      Accepted manuscript online: 
PACS:  07.57.Kp (Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)  
  07.57.-c (Infrared, submillimeter wave, microwave and radiowave instruments and equipment)  
Fund: Project supported by the National Basic Research Program of China (Grant No. 2011CBA00107) and the National High-Technology Research Development Program of China (Grant No. 2011AA010204).
Corresponding Authors:  Kang Lin     E-mail:  kanglin@nju.edu.cn

Cite this article: 

Tu Xue-Cou (涂学凑), Kang Lin (康琳), Liu Xin-Hua (刘新华), Mao Qing-Kai (毛庆凯), Wan Chao (万超), Chen Jian (陈健), Jin Biao-Bing (金飚兵), Ji Zheng-Ming (吉争鸣), Xu Wei-Wei (许伟伟), Wu Pei-Heng (吴培亨) Nb5N6 microbolometer array for terahertz detection 2013 Chin. Phys. B 22 040701

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