Please wait a minute...
Chin. Phys. B, 2009, Vol. 18(2): 664-670    DOI: 10.1088/1674-1056/18/2/045
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

Fast pore etching on high resistivity n-type silicon via photoelectrochemistry

Bao Xiao-Qing(包晓清)a)b), Ge Dao-Han(葛道晗)a)b), Zhang Sheng(张圣)a)b), Li Jin-Peng(李金鹏)a)b), Zhou Ping(周萍)a), Jiao Ji-Wei(焦继伟)a), and Wang Yue-Lin(王跃林)a)
a State Key Laboratories of Transducer Technology, National Key Laboratories of Microsystem Technology, Shanghai Institute of Microsystem and Information, Chinese Academy of Sciences, Shanghai 200050, China; b Graduate School of Chinese Academy of Sciences, Beijing 100049, China
Abstract  In this paper, five factors, namely the HF (hydrofluoric acid) concentration, field strength, illumination intensity as well as the oxidizing-power and conductivity of electrolytes were found to strongly affect the fast pore etching. The oxidizing power of aqueous HF electrolyte of different concentrations was especially measured and analysed. A positive correlation between optimal bias and HF concentration was generally observed and the relationship was semi-quantitatively interpreted. Pore density notably increased with enhanced HF-concentration or bias even on patterned substrates where 2D (two-dimensional) nuclei were densely pre-textured. The etch rate can reach 400μm/h and the aspect ratio of pores can be readily driven up to 250.
Keywords:  pore density      SCR width      H-passivation      current-burst-model      breakdown mechanism  
Received:  14 May 2008      Revised:  10 September 2008      Accepted manuscript online: 
PACS:  81.65.Cf (Surface cleaning, etching, patterning)  
  82.45.Vp (Semiconductor materials in electrochemistry)  
  82.50.-m (Photochemistry)  
  82.45.Gj (Electrolytes)  
  81.65.Mq (Oxidation)  
Fund: Project supported by Chinese National `863' Project (Grant No 2006AA04Z312) and `973' Project (Grant No 2006CB300403) and the National Natural Science Foundation of China (Grant No 60772030).

Cite this article: 

Bao Xiao-Qing(包晓清), Ge Dao-Han(葛道晗), Zhang Sheng(张圣), Li Jin-Peng(李金鹏), Zhou Ping(周萍), Jiao Ji-Wei(焦继伟), and Wang Yue-Lin(王跃林) Fast pore etching on high resistivity n-type silicon via photoelectrochemistry 2009 Chin. Phys. B 18 664

[1] Drop impact on substrates with heterogeneous stiffness
Yang Cheng(成阳), Jian-Gen Zheng(郑建艮), Chen Yang(杨晨), Song-Lei Yuan(袁松雷), Guo Chen(陈果), and Li-Yu Liu(刘雳宇). Chin. Phys. B, 2022, 31(8): 084702.
[2] Influence of water environment on paint removal and the selection criteria of laser parameters
Li-Jun Zhang(张丽君), Kai-Nan Zhou(周凯南), Guo-Ying Feng(冯国英), Jing-Hua Han(韩敬华),Na Xie(谢娜), and Jing Xiao(肖婧). Chin. Phys. B, 2022, 31(6): 064205.
[3] A radar-infrared compatible broadband absorbing surface: Design and analysis
Qing-Tao Yu(余庆陶), Yuan-Song Zeng(曾元松), and Guo-Jia Ma(马国佳). Chin. Phys. B, 2021, 30(7): 078402.
[4] Atomically flat surface preparation for surface-sensitive technologies
Cen-Yao Tang(唐岑瑶), Zhi-Cheng Rao(饶志成), Qian-Qian Yuan(袁茜茜), Shang-Jie Tian(田尚杰), Hang Li(李航), Yao-Bo Huang(黄耀波), He-Chang Lei(雷和畅), Shao-Chun Li(李绍春), Tian Qian(钱天), Yu-Jie Sun(孙煜杰), Hong Ding(丁洪). Chin. Phys. B, 2020, 29(2): 028101.
[5] Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching
Yuan Li(李源), Hongwei Yan(严鸿维), Ke Yang(杨科), Caizhen Yao(姚彩珍), Zhiqiang Wang(王志强), Chunyan Yan(闫春燕), Xinshu Zou(邹鑫书), Xiaodong Yuan(袁晓东), Liming Yang(杨李茗), Xin Ju(巨新). Chin. Phys. B, 2017, 26(11): 118104.
[6] Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors
Lei Wang(王磊), Jiaqi Zhang(张家琦), Liuan Li(李柳暗), Yutaro Maeda(前田裕太郎), Jin-Ping Ao(敖金平). Chin. Phys. B, 2017, 26(3): 037201.
[7] Effects of Si surficial structure on transport properties of La2/3Sr1/3MnO3 films
Xiao-Min Gu(顾晓敏), Wei Wang(王伟), Guo-Tai Zhou(周国泰), Kai-Ge Gao(高凯歌), Hong-Ling Cai(蔡宏灵), Feng-Ming Zhang(张凤鸣), Xiao-Shan Wu(吴小山). Chin. Phys. B, 2016, 25(10): 106701.
[8] Investigations of the optical properties of Si surface with microwires for solar cell applications
Li Li(郦莉), Shi-Liang Wu(吴仕良), Dong Yu(虞栋), Wei Wang(王伟), Wen-Chao Liu(刘文超), Xiao-Shan Wu(吴小山), Feng-Ming Zhang(张凤鸣). Chin. Phys. B, 2016, 25(2): 028401.
[9] Water-assisted highly enhanced crystallographic etching of graphene by iron catalysts
Xue Lei-Jiang (薛磊江), Yu Fang (余芳), Zhou Hai-Qing (周海青), Sun Lian-Feng (孙连峰). Chin. Phys. B, 2015, 24(3): 036802.
[10] Temperature effect on the electronic structure of Nb:SrTiO3 (100) surface
Zhang Shuang-Hong (张双红), Wang Jia-Ou (王嘉鸥), Qian Hai-Jie (钱海杰), Wu Rui (吴蕊), Zhang Nian (张念), Lei Tao (雷涛), Liu Chen (刘晨), Kurash Ibrahim (奎热西·伊布拉欣). Chin. Phys. B, 2015, 24(2): 027901.
[11] Chemical mechanical planarization of Ge2Sb2Te5 using IC1010 and Politex reg pads in acidic slurry
He Ao-Dong (何敖东), Liu Bo (刘波), Song Zhi-Tang (宋志棠), Wang Liang-Yong (王良咏), Liu Wei-Li (刘卫丽), Feng Gao-Ming (冯高明), Feng Song-Lin (封松林). Chin. Phys. B, 2014, 23(8): 088502.
[12] Application of thermal stress model to paint removal by Q-switched Nd:YAG laser
Zou Wan-Fang (邹万芳), Xie Ying-Mao (谢应茂), Xiao Xing (肖兴), Zeng Xiang-Zhi (曾祥志), Luo Ying (罗颖). Chin. Phys. B, 2014, 23(7): 074205.
[13] GaN hexagonal pyramids formed by a photo-assisted chemical etching method
Zhang Shi-Ying (张士英), Xiu Xiang-Qian (修向前), Hua Xue-Mei (华雪梅), Xie Zi-Li (谢自力), Liu Bin (刘斌), Chen Peng (陈鹏), Han Ping (韩平), Lu Hai (陆海), Zhang Rong (张荣), Zheng You-Dou (郑有炓). Chin. Phys. B, 2014, 23(5): 058101.
[14] Increased work function in PEDOT:PSS film under ultraviolet irradiation
Xing Ying-Jie (邢英杰), Qian Min-Fang (钱旻昉), Guo Deng-Zhu (郭等柱), Zhang Geng-Min (张耿民). Chin. Phys. B, 2014, 23(3): 038504.
[15] Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching
Wang Bo (王波), Su Shi-Chen (宿世臣), He Miao (何苗), Chen Hong (陈弘), Wu Wen-Bo (吴汶波), Zhang Wei-Wei (张伟伟), Wang Qiao (王巧), Chen Yu-Long (陈虞龙), Gao You (高优), Zhang Li (张力), Zhu Ke-Bao (朱克宝), Lei Yan (雷严). Chin. Phys. B, 2013, 22(10): 106802.
No Suggested Reading articles found!