Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges
Wu Jing(吴静), Zhang Peng-Yun(张鹏云), Sun Ji-Zhong(孙继忠), Zhang Jian(张健), Ding Zhen-Feng(丁振峰), and Wang De-Zhen(王德真)†
State Key Laboratory of Materials Modification by Laser, Ion and Electron Beam, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
Abstract Measurements of dust plasma parameters were carried out in the discharges of (SiH4/C2H4/Ar) mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a cylindrical chamber. Langmuir probe was employed for diagnosing and measuring the important plasma parameters such as electron density and electron temperature. The results showed that the electron density dropped, and in contrast the electron temperature rose when the dust particles formed. The curves of the electron density and temperature versus the RF power and pressure were presented and analysed. Further, it was found that the variations of electron temperature and the size of dust void with the RF power followed the similar trends. These trends might be useful for understanding more about the characteristics of dusty voids.
Received: 21 March 2007
Revised: 15 November 2007
Accepted manuscript online:
Fund: Project supported by the National
Natural Science Foundation of
China (Grant Nos 10505005 and 10775026).
Cite this article:
Wu Jing(吴静), Zhang Peng-Yun(张鹏云), Sun Ji-Zhong(孙继忠), Zhang Jian(张健), Ding Zhen-Feng(丁振峰), and Wang De-Zhen(王德真) Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges 2008 Chin. Phys. B 17 1848
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